Numerical analysis of surface wave excitation in a planar-type nonmagnetized plasma processing device

IEEE Transactions on Plasma Science

Volumn 27, Issue 1, 1999, Pages 164-170

  Chen, Qing ^a   Aoyagi, Paul H ^a   Katsurai, Makoto ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; MAXWELL EQUATIONS; NUMERICAL ANALYSIS; SURFACE WAVES;

FINITE DIFFERENCE TIME DOMAIN APPROXIMATION; PLASMA PROCESSING; SURFACE WAVE PROPAGATION;

PLASMA DEVICES;

EID: 0032628414     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.763108     Document Type: Article

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