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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 1, 2001, Pages 380-387

Near-field distribution of radial line slot antenna for surface-wave-coupled plasma generation

(6) Yamamoto, T a Ono, M a Ando, M b Goto, N c Ishii, N d Yasaka, Y e

a YAMAGATA UNIVERSITY (Japan)

b TOKYO INSTITUTE OF TECHNOLOGY (Japan)

c TAKUSHOKU UNIVERSITY (Japan)

d TOKYO ELECTRON LTD (Japan)

e KYOTO UNIVERSITY (Japan)

Author keywords

Near field distribution; Planar antenna; Plasma density; Radial line slot antenna; Surface wave coupled plasma

Indexed keywords

ANTENNA ARRAYS; ELECTROMAGNETIC FIELD EFFECTS; PLASMA SOURCES; SILICON WAFERS; SURFACE WAVES;

RADIAL LINE SLOT ANTENNA (RLSA);

SLOT ANTENNAS;

EID: 0035057870 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.40.380 Document Type: Article

Times cited : (15)

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