Planar microwave discharges with active control of plasma uniformity

Physics of Plasmas

Volumn 9, Issue 3, 2002, Pages 1029-

  Yasaka, Yasuyoshi ^a   Koga, Kazuya ^a   Ishii, Nobuo ^b   Yamamoto, Tetsuya ^c   Ando, Makoto ^d   Takahashi, Masaharu ^e  

^a KYOTO UNIVERSITY   (Japan)

^b TOKYO ELECTRON LTD   (Japan)

^c YAMAGATA UNIVERSITY   (Japan)

^d TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^e TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

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EID: 0036507023     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1447256     Document Type: Article

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