Misfit strain relaxation and dislocation formation in supercritical strained silicon on virtual substrates

Applied Physics Letters

Volumn 91, Issue 6, 2007, Pages

  Parsons, J ^a   Parker, E H C ^a   Leadley, D R ^a   Grasby, T J ^a   Capewell, A D ^b  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b AdvanceSis Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL RESOLVING POWER; STRAIN RELAXATION; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

DEFECT ETCHING; DISLOCATION FORMATION; LINEAR GRADED VIRTUAL SUBSTRATES; MISFIT STRAIN RELAXATION;

SILICON COMPOUNDS;

EID: 34547838661     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2769751     Document Type: Article

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