A novel simple and low cost 4 degree of freedom angular indexing calibrating technique for a precision rotary table

International Journal of Machine Tools and Manufacture

Volumn 47, Issue 12-13, 2007, Pages 1978-1987

  Jywe, W ^a   Chen, C J ^b   Hsieh, W H ^a   Lin, P D ^b   Jwo, H H ^a   Yang, T Y ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

4 Degree of freedom measurement; Error separation; Full circle test; Grating; Position sensing detector; Rotary table calibration

Indexed keywords

CALIBRATION; COST EFFECTIVENESS; DIFFRACTION GRATINGS; ERROR ANALYSIS; INDEXING (MATERIALS WORKING);

ERROR SEPARATION; POSITION SENSING DETECTOR; ROTARY TABLE; ROTARY TABLE CALIBRATION; STABILITY TEST;

DEGREES OF FREEDOM (MECHANICS);

EID: 34547818132     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2007.02.004     Document Type: Article

References (16)

1. Angle Encoder, Heidenhain GmbH, 2004.
2. Agilent 5529A Dynamic Calibrator, Agilent Technologies, 2000.
3. LDS Electronic Autocollimator, NewPort Corporation, 1998.
4. Huang P.S., Kiyono S., and Kamada O. Angle measurement based on the internal-reflection effect: a new method. Applied Optics 31 28 (1992) 6047-6055
5. Xiaoli D., Osami S., John E.G., and Takamasa S. Measurement of two- dimensional small rotation angles by using orthogonal parallel interference pattern. Applied Optics 35 28 (1996) 5657-5666
6. Xiaoli D., Osami S., John E.G., and Takamasa S. High accuracy, wide range, rotation angle measurement by the use of two parallel interference pattern. Applied Optics 36 25 (1997) 6190-6195
7. Chiu M.H., and Su D.C. Improved technique for measuring small angle. Applied Optics 36 28 (1997) 7104-7106
8. Zhou W., and Cai L. Interferometer for small-angle measurement based on total internal reflection. Applied Optics 37 25 (1998) 5657-5666
9. Huang P.S., and Li Y. Small-angle measurement by using of a single prism. Applied Optics 37 28 (1998) 6636-6642
10. Guo J., Zhu Z., and Deng W. Small-angle measurement based on surface-plasma resonance and the use of magneto-optical modulation. Applied Optics 38 31 (1999) 6550-6555
11. Ge Z., and Takeda M. High-resolution two-dimensional angle measurement technique based on fringe analysis. Applied Optics 42 34 (2003) 6859-6868
12. Chiu M.H., Wang S.F., and Chang R.S. Instrument for measuring small angle by use of multiple total internal reflection in heterodyne interferometry. Applied Optics 43 29 (2004) 5438-5442
13. Jywe W.Y., and Chen C.J. The development of a high-speed spindle measurement system using a laser diode and a quadrants sensor. International Journal of Machine Tools & Manufacture 45 (2005) 1162-1170
14. Kim J.A., Kim K.C., Bae E.W., Kim S., and Kwak Y.K. Six-degree-of-freedom displacement system using a diffraction grating. Review of Scientific Instruments 71 8 (2000) 3214-3219
15. Liu C.H., Jywe W.Y., Shyu L.H., and Chen C.J. Application of a diffraction grating and position sensitive detectors to the measurement of error motion and angular indexing of an indexing table. Precision Engineering 29 (2005) 440-448
16. K.Y. Lin, Application of laser interferometer to the automation calibration of angular indexing on machine tools, UMIST, Ph.D. Thesis, 1994.