Approaches to growth and study of properties of multilayer silicon-silicide heterostructures with buried semiconductor silicide nanocrystallites

Thin Solid Films

Volumn 515, Issue 22, 2007, Pages 8179-8188

  Galkin, N G ^a  

^a INSTITUTE OF AUTOMATION AND CONTROL PROCESSES   (Russian Federation)

Author keywords

Monolithic heteronanostructures; Nanocrystallites; Semiconductor silicides; Silicon

Indexed keywords

CRYSTAL GROWTH; MULTILAYERS; NANOCRYSTALLITES; OPTIMIZATION; PARAMETER ESTIMATION; POLYCRYSTALLINE MATERIALS; SILICIDES;

CHROMIUM DISILICIDES; MONOLITHIC HETERONANOSTRUCTURES; MULTILAYER REPETITION; SEMICONDUCTOR SILICIDES;

HETEROJUNCTIONS;

EID: 34547772093     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.02.043     Document Type: Article

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