Influence of hydrocarbon gasses on PECVD a-C:H film deposition

Plasmas and Polymers

Volumn 1, Issue 1, 1996, Pages 47-64

  Fourches, N ^a  

^a UNIVERSITÉ DE NANTES   (France)

Author keywords

Fourier transform IR; Hydrogenated amorphous carbon layers; UV visible absorption

Indexed keywords

ABSORPTION; ARGON; CHEMICAL VAPOR DEPOSITION; DISSOCIATION; EMISSION SPECTROSCOPY; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GLOW DISCHARGES; ION BOMBARDMENT; IONIZATION; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY;

ATOMIC HYDROGEN FORMATION; GAS PHASE PROCESSES; HYDROGENATED AMORPHOUS CARBON LAYERS; OPTICAL EMISSION SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; VISIBLE ABSORPTION;

HYDROCARBONS;

EID: 0030108242     PISSN: 10840184     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02532814     Document Type: Article

References (4)

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2. Y. Catherine, in Nato-ASl on Diamond and Diamond-like Films and Coalings, Vol. 266, R. E. Clausing et al., eds., Plenum Press, New York (1991), p. 193.
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4. J. W. Zou, K. Schmidt, K. Reichelt, and B. Dischler, J. Appl. Phys. 67, 487 (1990).