Single-step fabrication of Fresnel microlens array on sapphire substrate of flip-chip gallium nitride light emitting diode by focused ion beam

Applied Physics Letters

Volumn 91, Issue 5, 2007, Pages

  Lee, Ming Kwei ^a   Kuo, Kwei Kuan ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FLIP CHIP DEVICES; FOCUSED ION BEAMS; GALLIUM NITRIDE; LIGHT EMITTING DIODES; MICROLENSES; SAPPHIRE;

FOCUSED ION BEAM MILLING; FRESNEL MICROLENS ARRAYS; GALLIUM NITRIDE BLUE LIGHT EMITTING DIODES; SAPPHIRE SUBSTRATES;

MICROARRAYS;

EID: 34547657400     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2757602     Document Type: Article

References (21)

1. M. Khizar, Z. Y. Fan, K. H. Kim, J. Y. Lin, and H. X. Jiang, Appl. Phys. Lett. 86, 173504 (2005).
2. I. Schnitzer, E. Yablonovitch, C. Caneau, T. J. Gmitter, and A. Schere, Appl. Phys. Lett. 63, 2174 (1993).
3. H. C. Ohanion, Physics (Norton, New York, 1985), p. 859.
4. F. Schiappelli, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, and R. Proietti, Jpn. J. Appl. Phys., Part 1 43, 3772 (2004).
5. Y. Q. Fu and N. K. A. Bryan, Appl. Opt. 40, 5872 (2001).
6. T. Shiono, K. Setsune, O. Yamazaki, and K. Wasa, Appl. Opt. 26, 587 (1987).
7. T. Kim, A. J. Danner, and K. D. Choquette, Electron. Lett. 41, 49 (2005).
8. A. A. Tseng, J. Micromech. Microeng. 14, R15 (2004).
9. J. K. Kim, H. Luo, Y. Xi, M. J. Shah, T. Gessmann, and E. F. Schubert, J. Electrochem. Soc. 153, G105 (2006).
10. D. P. Adams and M. J. Vasile, J. Vac. Sci. Technol. B 24, 836 (2006).
11. M. K. Lee and K. K. Kuo, Jpn. J. Appl. Phys., Part 1 45, 2447 (2006).
12. P. M. Nellen and R. Brönnimann, Meas. Sci. Technol. 17, 943 (2006).
13. Y. Q. Fu, N. K. A. Bryan, and O. N. Shing, Opt. Express 7, 141 (2000).
14. Y. Sun and S. R. Forrest, J. Appl. Phys. 100, 073106 (2006).
15. B. Morgan and C. M. Waits, J. Microelectromech. Syst. 13, 113 (2004).
16. M. Khizar, Z. Y. Fan, K. H. Kim, J. Y. Lin, and H. X. Jiang, Appl. Phys. Lett. 86, 173504 (2005).
17. A. Kowalik, K. Góra, Z. Jaroszewicz, and A. Koodziejczyk, Microelectron. Eng. 77, 347 (2005).
18. Y. Q. Fu and N. K. A. Bryan, Opt. Eng. 39, 3008 (2000).
19. C. F. Madigan, M.-H. Lu, and J. C. Sturm, Appl. Phys. Lett. 76, 1650 (2000).
20. G. Gu, D. Z. Garbuzov, P. E. Burrows, S. Venkatesh, and S. R. Forrest, Opt. Lett. 22, 396 (1997).
21. H. W. Choi, C. Liu, and E. Gu, Appl. Phys. Lett. 84, 2253 (2004).