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Volumn 84, Issue 13, 2004, Pages 2253-2255
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GaN micro-light-emitting diode arrays with monolithically integrated sapphire microlenses
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CURRENT VOLTAGE CHARACTERISTICS;
INDUCTIVELY COUPLED PLASMA;
LIGHT EMISSION;
LIGHT EMITTING DIODES;
LIGHT REFLECTION;
MICROLENSES;
MONOLITHIC INTEGRATED CIRCUITS;
PLASMA ETCHING;
SAPPHIRE;
SEMICONDUCTOR QUANTUM WELLS;
SURFACE ROUGHNESS;
CONFOCAL MICROSCOPES;
MICRO-LIGHT-EMITTING DIODES (MICRO-LED);
OPTICAL PATHWAYS;
RESIST THERMAL REFLOW;
GALLIUM NITRIDE;
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EID: 2142753095
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1690876 Document Type: Article |
Times cited : (132)
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References (9)
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