Multiscale investigation of the influence of surface morphology on thin film CVD

Surface and Coatings Technology

Volumn 201, Issue 22-23 SPEC. ISS., 2007, Pages 8884-8887

  Barbato, A ^a   Fiorucci, A ^a   Rondanini, M ^a   Cavallotti, C ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

Chemical kinetics; Monte Carlo method; Morphology; Multiscale model; Si(1 0 0)

Indexed keywords

ANISOTROPY; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MONTE CARLO METHODS; REACTION KINETICS; THIN FILMS;

ANISOTROPHIC DIFFUSION; GAS PHASE CONCENTRATION; MACROSCALE MODEL;

SURFACE MORPHOLOGY;

ANISOTROPY; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MONTE CARLO METHODS; REACTION KINETICS; SURFACE MORPHOLOGY; THIN FILMS;

EID: 34547654445     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.04.071     Document Type: Article

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