Low temperature short channel polycrystalline silicon thin film transistors with high reliability for flat panel display

Thin Solid Films

Volumn 515, Issue 19 SPEC. ISS., 2007, Pages 7402-7405

  Park, Joong Hyun ^a   Song, In Hyuk ^a   Han, Min Koo ^a  

^a Seoul National University   (South Korea)

Author keywords

DIBL; Reliability; Short channel poly Si TFT; Thermal effect

Indexed keywords

ELECTRIC RESISTANCE; FLAT PANEL DISPLAYS; THERMAL EFFECTS; THIN FILM TRANSISTORS; THRESHOLD VOLTAGE;

FIELD EFFECT MOBILITY; HIGH DRAIN VOLTAGE; SHORT CHANNEL POLY-SI TFT;

POLYSILICON;

EID: 34547575682     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.130     Document Type: Article

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