Fabrication of stacked NbN/TiNx/NbN Josephson junctions using an inductively coupled plasma etching technique

IEEE Transactions on Applied Superconductivity

Volumn 17, Issue 2, 2007, Pages 210-213

  Shoji, Akira ^a   Koda, Nobuko ^a   Yamamori, Hirotake ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Josephson junctions; Multilayers; Niobium compounds; Plasma etching

Indexed keywords

CRITICAL CURRENTS; INDUCTIVELY COUPLED PLASMA; MULTILAYERS; NIOBIUM COMPOUNDS; PLASMA ETCHING; THICKNESS MEASUREMENT;

FABRICATED STACKS; THIN INTERMEDIATE ELECTRODES; VERTICAL STACKS;

JOSEPHSON JUNCTION DEVICES;

EID: 34547486526     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2007.897715     Document Type: Conference Paper

References (11)

1. P. D. Dresselhaus, Y. Chong, J. H. Plantenberg, and S. P. Benz, "Stacked SNS Josephson junction arrays for quantum, voltage standards," IEEE Trans. Appl. Supercond., vol. 13, pp. 930-933, Jun. 2003.
2. N stacked Josephson junctions," Appl. Phys. Lett., vol. 82, pp. 2467-2469, Apr. 2003.
3. Y. Chong, P. D. Dresselhaus, and S. P. Benz, "Thermal transport in stacked superconductor-normal metal-superconductor Josephson junctions," Appl. Phys. Lett., vol. 83, pp. 1794-1796, Sep. 2003.
4. N. Hadacek, P. D. Dresselhaus, Y. Chong, S. P. Benz, and J. E. Bonevich, "Fabrication and measurement of tall stacked arrays of SNS Josephson junctions," IEEE Trans. Appl. Supercond., vol. 15, pp. 110-113, Jun. 2005.
5. 2 - Nb Josephson junctions for ac voltage standards," IEEE Trans. Appl. Supercond., vol. 15, pp. 449-452, Jun. 2005.
6. x/NbN double-barrier junction arrays for programmable voltage standards," Appl. Phys. Lett., vol. 80, pp. 1415-1417, Feb. 2002.
7. n/NbN stacked junction array," IEEE Trans. Appl. Supercond., vol. 13, pp. 1093-1.095, Jun. 2003.
8. 2-barrier junctions," IEEE Trans. Appl. Supercond., vol. 15, pp. 461-464, Jun. 2005.
9. x/NbN double-junction stacks," Appl. Phys. Lett., vol. 88, pp. 042503-1-042503-3, 2006.
10. A. Shoji, H. Yamamori, M. Ishizaki, S. P. Benz, and P. D. Dresselhaus, "Operation of a NbN-based programmable Josephson voltage standard chip with a compact refrigeration system," IEEE Trans. Appl. Supercond., vol. 13, pp. 919-921, Jun. 2003.
11. M. Ashkin and J. R. Gavaler, "The upper critical field of NbN film," J. Appl. Phys., vol. 49, pp. 2449-2451, Apr. 1978.