Gate dielectric development for flexible electronics

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 1161-1165

  Joshi, P C ^a   Voutsas, A T ^a   Hartzell, J W ^a  

^a SHARP LABORATORIES OF AMERICA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISPLAY DEVICES; GATE DIELECTRICS; LEAKAGE CURRENTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SENSORS;

ELECTRICAL QUALITY; FLEXIBLE ELECTRONICS; FUNCTIONAL DEVICES; RF COMMUNICATION;

THIN FILM TRANSISTORS;

EID: 34547406706     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2723765     Document Type: Article

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