Application of multivariate statistical analysis methods for improved time-of-flight secondary ion mass spectrometry depth profiling of buried interfaces and particulate

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 878-885

  Lloyd, K G ^a  

^a DUPONT COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BURIED PARTICULATES; DATA SCALING; HOMOGENEOUS LAYERS;

DATA REDUCTION; ELECTRONIC EQUIPMENT; INTERFACES (MATERIALS); SECONDARY ION MASS SPECTROMETRY; STATISTICAL METHODS;

ELEMENTARY PARTICLES;

EID: 34547370376     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2735950     Document Type: Article

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