a-plane Mgx Zn1-x O films deposited on r -sapphire and its surface acoustic wave characteristics

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 857-861

  Chen, Ying ^a   Saraf, Gaurav ^a   Lu, Yicheng ^a   Wielunski, Leszek S ^a   Siegrist, Theo ^b  

^a RUTGERS UNIVERSITY   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; DEPOSITION; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SAPPHIRE; TERNARY ALLOYS; ZINC OXIDE;

COMPOSITION RATIOS; SPUTTERING TARGETS; SURFACE ACOUSTIC WAVE CHARACTERISTICS;

OXIDE FILMS;

EID: 34547341757     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2748801     Document Type: Article

References (17)

1. N. W. Emagetoglu, S. Muthukumar, P. Wu, R. H. Wittstruck, Y. Chen, and Y. Lu, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 50, 537 (2003).
2. R. H. Wittstruck, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 50, 1272 (2003).
3. S. Muthukumar, J. Zhong, Y. Chen, and Y. Lu, Appl. Phys. Lett. 82, 742 (2003).
4. C. K. Lau, S. K. Tiku, and K. M. Lakin, J. Electrochem. Soc. 127, 1843 (1980).
5. C. R. Gorla, N. W. Emanetoglu, S. Liang, W. E. Mayo, Y. Lu, M. Wraback, and H. Shen, J. Appl. Phys. 85, 2595 (1999).
6. N. W. Emagetoglu, G. Patounakis, S. Liang, C. R. Gorla, R. H. Wittstruck, Y. Chen, and Y. Lu, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48, 1389 (2001).
7. B. Zhang, L. Manh, K. Wakatsuki, T. Ohnishi, M. Lippmaa, N. Usami, M. Kawasaki, and Y. Segawa, Jpn. J. Appl. Phys., Part 1 42, 2291 (2003).
8. E. M. Kaidashev, M. Lorenz, H. von Wenckstern, A. Rahm, H.-C. Semmelhack, K. H. Han, G. Benndorf, C. Bundesmann, H. Hochmuth, and M. Grundmann, Appl. Phys. Lett. 82, 3901 (2003).
9. T. Mitsuyu, S. Ono, and K. Wasa, J. Appl. Phys. 51, 2464 (1980).
10. J. Koike, H. Tanaka, and H. Ieki, Jpn. J. Appl. Phys., Part 1 34, 2678 (1995).
11. H. Ieki, H. Tanaka, J. Koike, and T. Nishikawa, 1996 IEEE MTT-S Int. Microwave Symp., p. 409.
12. N. W. Emanetoglu, S. Liang, C. Gorla, and Y. Lu, Proc. of the 1997 IEEE Ultrason. Symp., p. 195.
13. J. Lee, H. Lee, S. Seo, and J. Park, Thin Solid Films 398-399, 641 (2001).
14. G. Saraf, Ying Chen, T. Siegrist, L. S. Wielunski, and Y. Lu, J. Electron. Mater. 35, 1306 (2006).
15. C. R. Gorla, W. E. Mayo, S. Liang, and Y. Lu, J. Appl. Phys. 87, 3736 (2000).
16. E. L. Adler, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 37, 485 (1990).
17. R. H. Wittstruck, N. W. Emanetoglu, Y. Lu, S. Laffey, and A. Ballato, J. Acoust. Soc. Am. 118 (3), 1414 (2005).