Epitaxial growth and characterization of high quality ZnO films for surface acoustic wave applications

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1997, Pages 195-199

  Emanetoglu, Nuri W ^a   Liang, Shaohua ^a   Gorla, Chandrasekhar ^a   Lu, Yicheng ^a   Jen, Shen ^a   Subramanian, Rajan ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE VELOCITY MEASUREMENT; CRYSTAL ORIENTATION; ELECTROACOUSTIC TRANSDUCERS; ELECTRODES; EPITAXIAL GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; PIEZOELECTRIC MATERIALS; SUBSTRATES; SURFACE STRUCTURE; ZINC OXIDE;

COUPLING COEFFICIENT; ELECTRODE REFLECTIVITY; SOLID ELECTRODE TEST TRANSDUCERS;

DIELECTRIC FILMS;

EID: 0031343083     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)