SCOPUS 정보 검색 플랫폼

Volumn 35, Issue 6, 2006, Pages 1306-1310

Hybrid deposition of piezoelectric (112̄0) Mg xZn 1-xO (0 ≤ x ≤ 0.3) on (011̄2) R-sapphire substrates using RF sputtering and MOCVD

(5) Saraf, Gaurav a Chen, Ying a Siegrist, Theo b Wielunski, Leszek S c Lu, Yicheng a

a RUTGERS UNIVERSITY (United States)

b LUCENT TECHNOLOGIES (United States)

c RUTGERS UNIVERSITY (United States)

Author keywords

Field emission scanning electron microscopy (FESEM); Metalorganic chemical vapor deposition (MOCVD); MgZnO; Rutherford back scatter (RBS); Sputtering; Surface acoustic wave (SAW); X ray diffraction (XRD)

Indexed keywords

FIELD EMISSION SCANNING ELECTRON MICROSCOPY (FESEM); MGZNO; RUTHERFORD BACK SCATTER (RBS); SURFACE ACOUSTIC WAVE (SAW);

METALLORGANIC CHEMICAL VAPOR DEPOSITION; PIEZOELECTRICITY; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SPUTTERING; THIN FILMS; X RAY DIFFRACTION;

PIEZOELECTRIC DEVICES;

EID: 33746216362 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/s11664-006-0259-x Document Type: Conference Paper

Times cited : (7)

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