The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon

International Journal of Manufacturing Technology and Management

Volumn 12, Issue 1-3, 2007, Pages 270-283

  Marsh, Eric R ^a   Couey, Jeremiah A ^a   Vallance, R Ryan ^b   Yi, Allen Y ^c  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b GEORGE WASHINGTON UNIVERSITY   (United States)

^c OHIO STATE UNIVERSITY   (United States)

Author keywords

Brittle materials grinding; Process monitoring; Silicon grinding

Indexed keywords

ANISOTROPY; BRITTLENESS; CRYSTALLOGRAPHY; GRINDING (COMMINUTION); MICROCRYSTALLINE SILICON; PROCESS MONITORING;

AEROSTATIC SPINDLES; CRYSTALLOGRAPHIC ORIENTATION; MONOCRYSTALLINE SILICON; ULTRA PRECISION GRINDING;

MATERIALS SCIENCE;

EID: 34547311904     PISSN: 13682148     EISSN: None     Source Type: Journal    
DOI: 10.1504/ijmtm.2007.014159     Document Type: Article

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