In situ growth rate measurements during plasma-enhanced chemical vapour deposition of vertically aligned multiwall carbon nanotube films

Nanotechnology

Volumn 18, Issue 30, 2007, Pages

  Jonsson M ^a   Nerushev, O A ^a,b   Campbell, E E B ^a  

^a UNIVERSITY OF GOTHENBURG   (Sweden)

^b KUTATELADZE INSTITUTE OF THERMOPHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; FILM GROWTH; GROWTH RATE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFLECTION; THICK FILMS;

INITIAL GROWTH RATE; REFLECTIVITY MEASUREMENTS; THERMAL CVD GROWTH;

MULTIWALLED CARBON NANOTUBES (MWCN);

CARBON; IRON; NANOTUBE; SILICON;

ARTICLE; CATALYST; CHEMICAL REACTION; FILM; GROWTH RATE; LASER; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRIORITY JOURNAL; VAPOR;

EID: 34547165049     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/30/305702     Document Type: Article

References (13)

1. Meyyappan M 2005 Carbon Nanotubes Science and Applications (Boca Raton, FL: CRC Press)
2. Boskovic B O, Stolojan V, Khan R U A, Haq S and Silva R P 2002 Nat. Mater. 2 165
3. Geohegan D B, Puretzky A A, Ivanov I N, Jesse S, Eres G and Howe J Y 2003 Appl. Phys. Lett. 83 1851
4. Puretzky A A, Geohegan D B, Jesse S, Ivanov I N and Eres G 2005 Appl. Phys. A 81 223
5. Kim D-H, Jang H S, Kim C-D, Cho D S, Yang H-S, Kang H-D, Min B-K and Lee H-R 2003 Nano Lett. 3 863
6. Kim D-H, Jang H S, Kim C-D, Cho D S, Jee J-G and Lee H-R 2003 Nanotechnology 14 46
7. Morjan R E, Maltsev V, Nerushev O A, Yao Y, Falk L K L and Campbell E E B 2004 Chem. Phys. Lett. 383 385
8. Rohlfing E A 2003 J. Chem. Phys. 118 7622
9. Yao Y, Falk L K L, Morjan R E, Nerushev O A and Campbell E E B 2007 Carbon at press
10. Meyyappan M, Delzeit L, Cassell A and Hash D 2003 Plasma Sources Sci. Technol. 12 205
11. Louchev O A, Sato Y and Kanda H 2002 Appl. Phys. Lett. 80 2752
12. Zuiker C D, Gruen D M and Krauss A R 1996 J. Appl. Phys. 79 3541
13. Jönsson M, Nerushev O A and Campbell E E B 2007 Appl. Phys. A 88 261