In situ laser reflectance interferometry measurement of diamond film growth

Journal of Applied Physics

Volumn 79, Issue 7, 1996, Pages 3541-3547

  Zuiker, Christopher D ^a   Gruen, Dieter M ^a   Krauss, Alan R ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATTENUATION; FILM GROWTH; HELIUM NEON LASERS; HYDROGEN; INTERFEROMETRY; MATHEMATICAL MODELS; METHANE; MORPHOLOGY; RAMAN SPECTROSCOPY; SURFACE ROUGHNESS; THICKNESS MEASUREMENT;

FILM THICKNESS; FRESNEL REFLECTION; GROWTH RATE; LASER REFLECTANCE INTERFEROMETRY; REFLECTIVITY;

DIAMOND FILMS;

EID: 0030127633     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361406     Document Type: Article

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