Using defined structures on very thin foils for characterizing AFM tips

Ultramicroscopy

Volumn 107, Issue 10-11, 2007, Pages 1086-1090

  Machleidt, T ^a   Franke, K H ^a   Romanus, H ^a   Cimalla, V ^a   Niebelschutz M ^a   Spiess L ^a   Ambacher, O ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

AFM; FIB; Foil; Nanomeasuring; Thin film; Tip geometry; Tip reconstruction

Indexed keywords

NANOMEASURING; TIP GEOMETRY; TIP RECONSTRUCTION;

ATOMIC FORCE MICROSCOPY; ELECTRON MICROSCOPY; FOCUSED ION BEAMS; GEOMETRY; LITHOGRAPHY; THIN FILMS;

METAL FOIL;

LIMESTONE;

ALGORITHM; ANALYTIC METHOD; ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMICAL STRUCTURE; ELECTRON MICROSCOPY; FOIL; GEOMETRY; MEASUREMENT;

EID: 34447646550     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2007.05.004     Document Type: Article

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