A colored Petri net-based approach to the design of 300mm wafer fab controllers

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 2, Issue , 2001, Pages 1813-1819

  Park, J ^a   Reveliotis, S ^a   Bodner, D ^a   Zhou, C ^a   McGinnis, L ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MACHINE DESIGN; PETRI NETS; RESOURCE ALLOCATION; ROUTERS;

COLORED PETRI NETS (CPN); WATER FAB CONTROLLERS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034868181     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. A survey of factory control algorithms that can be implemented in a multi-agent heterarchy: Dispatching, scheduling, and pull
2. 300mm factory layout and automated material handling system analysis
3. Modeling and analysis using petri nets for semiconductor fabrication
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5. High-fidelity rapid prototyping of 300mm fabs through discrete event system modeling
6. Liveness-enforcing supervisors for resource allocation systems with reworks, forbidden states, and uncontrollable events
7. Using simulation to evaluate complex control logic for lot delivery
8. Modeling, analysis, simulation, scheduling and control of semiconductor manufacturing systems: A petri net approach