Unique MEMS characterization solutions enabled by laser Doppler vibrometer measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4827, Issue , 2002, Pages 478-485

  Speller, Kevin E ^a   Goldberg, Howard ^a   Gannon, Jeff ^a   Lawrence, Eric ^b  

^a Applied MEMS Inc   (United States)

^b Po1ytec PI ^*  (United States)

Author keywords

Accelerometer; Characterization; Doppler; Laser; LDV; MEMS; Mirror; Optical; Packaging; Switch ing

Indexed keywords

ACCELEROMETERS; HERMETIC DEVICES; LASER DOPPLER VELOCIMETERS; MEASUREMENT THEORY; MIRRORS; NATURAL FREQUENCIES;

LASER DOPPLER VIBROMETERS (LDV);

MICROELECTROMECHANICAL DEVICES;

EID: 0036421356     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.468197     Document Type: Article

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8. Richter, Alan, "MEMS: Tiny parts, big profits?", Semiconductor Magazine, pp. 18-24, August 2001.