Femtosecond Laser Microfabrication of Photonic Crystals

3D Laser Microfabrication: Principles and Applications

Volumn , Issue , 2006, Pages 239-286

  Mizeikis, Vygantas ^a   Matsuo, Shigeki ^b   Juodkazis, Saulius ^a   Misawa, Hiroaki ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

^b UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

Direct laser writing; Laser microfabrication; Lithography; Optical damage; Periodic light intensity patterns; Photomodification; Photonic crystals; Spiral architecture; Woodpile architecture

Indexed keywords

EID: 34250899974     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/352760846X.ch10     Document Type: Chapter

References (82)

1. E. Yablonovitch, "Inhibited spontaneous emission in solid-state physics and electronics," Phys. Rev. Lett. 58, pp. 2059-62, 1987.
2. S. John, "Strong localization of photons in certain disordered dielectric superlattices," Phys. Rev. Lett. 58 (23), pp. 2486-9, 1987.
3. J. D. Joannopoulos, R. D. Meade, and J. N. Winn, Photonic Crystals: Molding the Flow of Light, Princeton University Press, Princeton, New Jersey, 1995.
4. S. Johnson and Joannopoulos J.D., Photonic crystals: The Road From Theory to Practice, Kluwer Academic Publishers, 2002.
5. S. Noda and T. Baba, eds., A Roadmap on Photonic Crystals, Kluwer Academic Publishers, 2003.
6. K. Sakoda, Optical Properties of Photonic Crystals, vol. 80 of Springer Series in Optical Sciences, Springer Verlag, 2001.
7. M. Qi, E. Lidorikis, P. Rakich, S. Johnson, J. Joannopoulos, E. Ippen, and H. Smith, "A three-dimensional optical photonic crystal with designed point defects.," Nature 429 (6991), pp. 538-42, 2004.
8. S. Ogawa, M. Imada, S. Yoshimoto, M. Okano, and S. Noda, "Control of light emission by 3D photonic crystals," Science 305 (5681), pp. 227-9, 2004.
9. S. Noda, K. Tomoda, N. Yamamoto, and A. Chutinan, "Full three-dimensional photonic bandgap crystals at near-infrared wavelengths," Science 289 (5479), pp. 604-6, 2000.
10. H. Misawa, H. Sun, S. Juodkazis, M. Watanabe, and S. Matsuo, "Microfabrication by femtosecond laser irradiation," in Laser Applications in Microelectronic and Optoelectronic Manufacturing v, H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski, eds., pp. 246-260, SPIE, vol. 3933, 2000.
11. E. N. Glezer and E. Mazur, "Ultrafastlaser driven micro-explosions in transparent materials," Appl. Phys. Lett. 71, pp. 882-4, 1997.
12. M. Goppert-Mayer, "Uber Elementarakte mit zwei Quantensprungen," Ann. Phys. 9, pp. 273-94, 1931.
13. N. Tanno, K. Ohkawara, and H. Inaba, "Coherent transient multi-photon scattering in a resonant two-level system," Phys. Rev. Lett. 46, pp. 1282-85, 1981.
14. B. Stuart, M. Feit, A. Rubenchik, B. Shore, and M. Perry, "Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses," Phys. Rev. Lett. 74, pp. 2248-51, 1995.
15. N. Bloembergen, "Laser-induced electric breakdown in solids," IEEE Journ. Quant. Electron. 10, pp. 375-86, 1974.
16. B. Stuart, M. Feit, A. Rubenchik, S. Herman, B. Shore, and M. Perry, "Nanosecond-to-femtosecond laser induced breakdown in dielectrics," Phys. Rev. B. 53, pp. 1749-61, 1996.
17. C. Carr, H. Radousky, and S. Demos, "Wavelength dependence of laserinduced damage: determining the damage initiation mechanisms.," Phys Rev Lett 91 (12), p. 127402, 2003.
18. B. Cumpston, S. Ananthavel, S. Barlow, D. Dyer, J. Ehrlich, L. Erskine, A. Heikal, S. Kuebler, I.-Y. Lee, D. Mccord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. Marder, and J. Perry, "Twophoton polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, pp. 51-4, 1999.
19. S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, "Finer features for functional microdevices," Nature 412, pp. 697-8, 2001.
20. H. Sun, S. Matsuo, and H. Misawa, "Three-dimensional photonic crystal structures achieved with two-photonabsorption photopolymerization of resin," Appl. Phys. Lett. 74, pp. 786-8, 1999.
21. H. B. Sun, Y. Xu, S. Matsuo, and H. Misawa, "Micro-fabrication and characteristics of two-dimensional photonic crystal structures in vitreous silica," Opt. Rev. 6, pp. 396-8, 1999.
22. H. B. Sun, Y. Liu, S. Juodkazis, K. Sun, J. Nishii, Y. Suzuki, S. Matsuo, and H. Misawa, "Photonic lattices achieved with high-power femtosecond laser microexplosion in transparent solid materials," in Proc. SPIE, e. a. X. Chen, ed., 3888, pp. 131-42, 2000.
23. H. B. Sun, Y. Liu, K. Sun, S. Juodkazis, M. Watanabe, S. Matsuo, H. Misawa, and J. Nishii, "Inlayed "atom"-like threedimensional photonic crystal structures created with femtosecond laser microfabrication," Mat. Res. Soc. Symp. Proc. 605, pp. 85-90, 2000.
24. H. Sun, S. Matsuo, and H. Misawa, "Three-dimensional photonic crystal structures achieved with two-photonabsorption photopolymerization of resin," Appl. Phys. Lett. 74, pp. 786-8, 1998.
25. H. Sun, V. Mizeikis, Y. Xu, S. Juodkazis, J.-Y. Ye, S. Matsuo, and H. Misawa, "Microcavities in polymeric photonic crystals," Appl. Phys. Lett. 79, pp. 1-3, 2001.
26. V. Mizeikis, K. Seet, S. Juodkazis, and H. Misawa, "Three-dimensional woodpile photonic crystal templates for the infrared spectral range.," Opt Lett 29 (17), pp. 2061-3, 2004.
27. K. Seet, V. Mizeikis, S. Matsuo, S. Juodkazis, and H. Misawa, "Three-dimensional spiral-architecture photonic crystals obtained by direct laser writing," Adv. Mater. 17, pp. 541-4, 2005.
28. M. Watanabe, S. Juodkazis, H.-B. Sun, S. Matsuo, H. Misawa, M. Miwa, and R. Kaneko, "Transmission and photoluminescence images of three-dimensional memory in vitreous silica," Appl. Phys. Lett. 74, pp. 3957-9, 1999.
29. M. Campbell, D. Sharp, M. Harrison, R. Denning, and A. Turberfield, "Fabrication of photonic crystals for the visible spectrum by holographic lithography," Nature 404 (6773), pp. 53-6, 2000.
30. A. Marcinkevicius, V. Mizeikis, S. Juodkazis, S. Matsuo, and H. Misawa, "Effect of refractive index mismatch on laser microfabrication in silica glass," Appl. Phys. A 76, pp. 257-60, 2003.
31. K. Ho, C. Chan, and C. Sokoulis, "Existence of photonic gaps in periodic dielectric structures," Phys. Rev. Lett. 65, p. 3152, 1990.
32. P. N. Pusey and W. van Megen, "Phase behaviour of concentrated suspensions of nearly hard colloidal spheres," Nature 320, pp. 340-2, 1986.
33. H. Míguez, C. López, F. Meseguer, A. Blanco, L. Vásquez, and R. Mayoral, "Photonic crystal properties of packed submicrometer SiO2 spheres," Appl. Phys. Lett. 71, pp. 1148-50, 1996.
34. H. Míguez, A. Blanco, F. Meseguer, C. López, H. M. Yates, M. E. Pemble, V. Fornés, and A. Mifsud, "Bragg diffraction from indium phosphide infilled fcc silica colloidal crystals," Phys. Rev. B 59, pp. 1563-6, 1999.
35. A. Blanco, E. Chomski, S. Grabtchak, M. Ibisate, S. John, S. Leonard, C. Lopez, F. Meseguer, H. Miguez, J. Mondia, G. Ozin, O. Toader, and H. van Driel, "Large-scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap near 1.5 micrometres," Nature 405 (6785), pp. 437-40, 2000.
36. M. Gu, Advanced Optical Imaging Theory, vol. 75 of Springer Series in Optical Sciences, Springer Verlag, 1999.
37. T. Apostolova and Y. Hahn, "Modelling of Laser-induced Breakdown in Dielectrics with Subpicosecond Pulses," J. Appl. Phys. 88, pp. 1024-34, 2000.
38. J. Natoli, L. Gallais, H. Akhouayri, and C. Amra, "Laser-induced damage of materials in bulk, thin-film, and liquid forms.," Appl Opt 41 (16), pp. 3156-6, 2002.
39. K. Yamasaki, M. Watanabe, S. Juodkazis, S. Matsuo, and H. Misawa, "Threedimensional drilling in polymer films by femtosecond laser pulse irradiation," in Proc. 49th Spring Meeting, Japan Soc. of Appl. Phys., p. 1119, 2002.
40. K. Yamasaki, S. Juodkazis, S. Matsuo, and H. Misawa, "Three-dimensional microchannels in polymers: one step fabrication," Appl. Phys. A 77, pp. 371-3, 2003.
41. M. J. Ventura, M. Straub, and M. Gu, "Void channel microstructures in resin solids as an efficient way to infrared photonic crystals," Appl. Phys. Lett. 82, pp. 1649-51, 2003.
42. M. Straub and M. Gu, "Near-infrared photonic crystals with higher order bandgaps generated by two-photon polymerization," Opt. Lett. 27, pp. 1824-6, 2002.
43. M. Straub, M. Ventura, and M. Gu, "Multiple higher-order stop gaps in infrared polymer photonic crystals.," Phys Rev Lett 91 (4), p. 043901, 2003.
44. G. Zhou, M. Ventura, M. Vanner, and M. Gu, "Fabrication and characterization of face-centered-cubic void dots photonic crystals in a solid polymer material," Appl. Phys. Lett. 86, p. 011108, 2005.
45. G. Fowles, Introduction to Modern Optics, Dover Publications, New York, 1989.
46. H.-B. Sun, Y. Xu, S. Matsuo, and H. Misawa, "Microfabrication and characteristics of two-dimensonal photonic crystal structures in vitreous silica," Optical Review 6, pp. 396-8, 1999.
47. H. Misawa, H.-B. Sun, S. Juodkazis, M. Watanabe, and S. Matsuo, "Microfabrication by femtosecond laser irradiation," in Proc. SPIE, 3933, pp. 246-59, 2000.
48. M. Watanabe, S. Juodkazis, S. Matsuo, J. Nishii, and H. Misawa, "Crosstalk in photoluminescence readout of threedimensional memory in vitreous silica by one- and two-photon excitation," Jpn. J. Appl. Phys. 39, pp. 6763-7, 2000.
49. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, "Photowritten optical waveguides in various glasses with ultrashort pulse laser," Appl. Phys. Lett. 71, pp. 80-2, 1997.
50. K. M. Ho, C. T. Chan, C. M. Soukoulis, R. Biswas, and M. Sigalas, "Photonic band gaps in three dimensions: New layer-by-layer periodic structures," Solid State Commun. 89, pp. 413-6, 1994.
51. M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. Soukoulis, "Direct laser writing of threedimensional photonic-crystal templates for telecommunications.," Nat. Mater. 3 (7), pp. 444-7, 2004.
52. G. Witzgall, R. Vrijen, E. Yablonovitch, V. Doan, and B. Schwartz, "Single-shot two-photon exposure of commercial photoresist for the production of three dimensionalstructures," Opt. Lett. 23, pp. 1745-7, 1998.
53. S. Noda, A. Chutinan, and M. Imada, "Trapping and emission of photons by a single defect in a photonic bandgap structure," Nature 407, pp. 608-10, 2000.
54. S. Noda, "Three-dimensional photonic crystals operating at optical wavelength region," Physica B 279, pp. 142-9, 2000.
55. J. Pendry and A. Mackinnon, "Calculation of photon dispersion relations," Phys. Rev. Lett 69, p. 2772, 1992.
56. J. B. Pendry, "Calculating photonic bandgap structure," J. Phys. Cond. Matt. 8, pp. 1085-108, 1996.
57. O. Toader and S. John, "Proposed square spiral microfabrication architecture for large three-dimensional photonic band gap crystals.," Science 292 (5519), pp. 1133-5, 2001.
58. O. Toader and S. John, "Square spiral photonic crystals: robust architecture for microfabrication of materials with large three-dimensional photonic band gaps.," Phys. Rev. E 66, p. 016610, 2002.
59. A. Chutinan and S. Noda, "Spiral threedimensional photonic-band-gap structure," Phys. Rev. B 57, pp. R2006-8, 1998.
60. S. Kennedy, M. Brett, O. Toader, and S. John, "Fabrication of tetragonal square spiral photonic crystals," Nano Letters 2, pp. 59-62, 2002.
61. S. Kennedy, M. Brett, H. Miguez, O. Toader, and S. John, "Optical properties of a three-dimensional silicon square spiral photonic crystal," Photonics and Nanostructures 1, pp. 37-42, 2003.
62. M. Jensen and M. Brett, "Square spiral 3D photonic bandgap crystals at telecommunications frequencies," Opt. Express 13, pp. 3348-54, 2005.
63. L. Cai, X. Yang, and Y. Wang, "All fourteen bravais lattices can be formed by interference of four noncoplanar beams," Opt. Lett. 27, pp. 900-2, 2002.
64. L. Z. Cai, X. L. Yang, and Y. R. Wang, "Formation of a microfiber bundle by interference of three noncoplanar beams," Opt. Lett. 26, pp. 1858-60, 2000.
65. L. Cai, X. Yang, and Y. Wang, "Formation of a microfiber bundle by interference of three noncoplanar beams," Opt. Lett. 26, pp. 1858-60, 2001.
66. X. Yang and L. Cai, "Wave design of the interference of three noncoplanar beams for microfiber fabrication," Opt. Commun. 208, pp. 293-7, 2002.
67. C. Ullal, M. Maldovan, E. Thomas, G. Chen, Y.-J. Han, and S. Yang, "Photonic crystals through holographic lithography:Simple cubic, diamond-like, and gyroid-like structures.," Appl. Phys. Lett. 84, pp. 5434-36, 2004.
68. D. Sharp, A. Turberfield, and R. Denning, "Holographic photonic crystals with diamond symmetry," Phys. Rev. B. 68, p. 205102, 2003.
69. X. Wang, J. Xu, H. Su, Z. Zeng, Y. Chen, H. Wang, Y. Pang, and W. Tam, "Three-dimensional photonic crystals fabricated by visible light holographic lithography," Appl. Phys. Lett. 82, pp. 2212-14, 2003.
70. V. Berger, O.Gauthier-Lafaye, and E. Costard, "Photonic band gaps and holography," J. Appl. Phys. 82, pp. 60-4, 1997.
71. T. Kondo, S. Matsuo, S. Juodkazis, and H. Misawa, "Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals," Appl. Phys. Lett. 79, pp. 725-7, 2001.
72. T. Kondo, S. Matsuo, S. Juodkazis, V. Mizeikis, and H. Misawa, "Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses," Appl. Phys. Lett. 82, pp. 2758-60, 2003.
73. T. Kondo, K. Yamasaki, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, "Three-dimensional microfabrication by femtosecond pulses in dielectrics," Thin Solid Films 453-454, pp. 550-6, 2004.
74. Y. Nakata, T. Okada, and M. Maeda, "Fabrication of dot matrix, comb, and nanowire structures using laser ablation by interfered femtosecond laser beams," Appl. Phys. Lett. 81, pp. 4239-41, 2002.
75. Y. Nakata, T. Okada, and M. Maeda, "Nano-sized hollow bump array generated by single femtosecond laser pulse," Japanese J. Appl. Physics 42, pp. L1452-54, 2003.
76. H.-B. Sun, A. Nakamura, S. Shoji, X.-M. Duan, and S. Kawata, "Threedimensional nanonetwork assembled in a photopolymerized rod array," Adv. Mater. 15, pp. 2011-2014, 2003.
77. H. Segawa, S. Matsuo, and H. Misawa, "Fabrication of fine-pitch tio2-organic hybrid dot arrays using multi-photon absorption of femtosecond pulses," Appl. Phys. A, pp. 407-409, 2004.
78. I. Divliansky, A. Shishido, I.-C. Khoo, T. Mayer, D. Pena, S. Nishimura, C. Keating, and T. Mallouk, "Fabrication of two-dimensional photonic crystals using interference lithography and electrodeposition of CdSe," Appl. Phys. Lett. 79, pp. 3392-94, 2001.
79. I. Divliansky, T. Mayer, K. Holliday, and V. Crespi, "Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography," Appl. Phys. Lett. 82, pp. 1667-69, 2003.
80. G. Schneider, J. Murakowski, S. Venkataraman, and D. Prather, "Combination lithography for photonic-crystal circuits," J. Vac. Sci. Technol. B 22, pp. 146-51, 2004.
81. A. Chelnokov, S. Rowson, J.-M. Lourtioz, V. Berger, and J.-Y. Courtois, "An optical drill for the fabrication of photonic crystals," J. Opt. A: Pure Appl. Opt. 1, pp. L3-L6, 1999.
82. Y. V. Miklyaev, D. C. Meisel, A. Blanco, G. von Freymann, K. Busch, W. Koch, C. Enkrich, M. Deubel, and M. Wegener, "Three-dimensional face-centeredcubic photonic crystal templates by laser holography: fabrication, optical characterization, and band-structure calculations," Appl. Phys. Lett. 82, p. 1284, 2003.