Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography

Applied Physics Letters

Volumn 82, Issue 11, 2003, Pages 1667-1669

  Divliansky, Ivan ^a   Mayer, Theresa S ^a   Holliday, Kito S ^b   Crespi, Vincent H ^b  

^a The Pennsylvania State University   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; CRYSTAL STRUCTURE; DIFFRACTION GRATINGS; ELECTROMAGNETIC WAVE DIFFRACTION; LASER BEAMS; LIGHT INTERFERENCE; LITHOGRAPHY; PHOTOSENSITIVITY;

PHOTOSENSITIVE POLYMERS;

POLYMERS;

EID: 0037451317     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1560860     Document Type: Article

References (20)

1. A. Chutinan and S. Noda, Appl. Phys. Lett. 75, 3739 (1999).
2. H. Kosaka, T. Kawashima, A. Tomita, M. Notomi, T. Tamamura, T. Sato, and S. Kawakami, Phys. Rev. B 58, 10096 (1998).
3. E. Yablonovitch, J. Phys.: Condens. Matter 5, 2443 (1993).
4. J. Schilling, F. Muller, S. Matthias, R. Wehrspohn, U. Gosele, and K. Busch, Appl. Phys. Lett. 78, 1180 (2001).
5. S.-Y. Lin, E. Chow, V. Hietala, P. Villeneuve, and J. Joannopoulos, Science 282, 274 (1998).
6. S. Noda, A. Chutinan, and M. Imada, Nature (London) 407, 608 (2000).
7. A. Talneau, L. Gouezigou, N. Bouadma, M. Kafesaki, C. Soukoulis, and M. Agio, Appl. Phys. Lett. 80, 547 (2002).
8. J. Joannopoulos, R. Meade, and J. Winn, Photonic Crystals (Princeton University Press, Princeton, NJ, 1995).
9. C. Cheng and A. Scherer, J. Vac. Sci. Technol. B 13, 2696 (1995).
10. M. Campbell, D. Sharp, M. Harrison, R. Denning, and A. Turberfield, Nature (London) 404, 53 (2000).
11. P. Jiang, J. Bertone, K. Hwang, and V. Colvin, Chem. Mater. 11, 2132 (1999).
12. A. Blanco, E. Chomski, S. Grabtchak, M. Ibisate, S. John, S. Leonard, C. Lopez, F. Meseguer, H. Miguez, J. Mondia, G. Ozin, O. Toader, and H. van Driel, Nature (London) 405, 437 (2000).
13. V. Tondiglia, L. Natarajan, R. Sutherland, D. Tomlin, and T. Bunning, Adv. Mater. 14, 187 (2002).
14. V. Berger, O. Gauthier-Lafaye, and E. Costard, J. Appl. Phys. 82, 60 (1997).
15. S. Shoji and S. Kawata, Appl. Phys. Lett. 76, 2668 (2000).
16. G. Subramania, K. Constant, R. Biswas, M. Sigalas, and K.-M. Ho, Appl. Phys. Lett. 74, 3933 (1999).
17. I. Divliansky, A. Shishido, I.-C. Khoo, D. Pena, S. Nishimura, C. Keating, and T. Mallouk, Appl. Phys. Lett. 79, 3392 (2001).
18. M. Hutley, J. Phys. E 9, 513 (1976).
19. S. Johnson and J. Joannopoulos, Opt. Express 8, 173 (2001).
20. O. Velev and E. Kaler, Adv. Mater. 12, 531 (2000).