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Volumn 48, Issue 5, 2007, Pages 975-979

Excimer laser annealing of hydrogen modulation doped a-Si film

Author keywords

Amorphous silicon; Desorption energy; Excimer laser annealing; Hydrogen modulation doped amorphous silicon; Nucleation; Polycrystalline silicon

Indexed keywords

ANNEALING; CRYSTALLIZATION; DESORPTION; EXCIMER LASERS; MELTING; NUCLEATION; POLYSILICON;

EXCIMER LASER ANNEALING (ELA); HYDROGEN CONCENTRATION; HYDROGEN MODULATION; LOW ENERGY DENSITY;

METALLIC FILMS;

EID: 34250834930 PISSN: 13459678 EISSN: None Source Type: Journal
DOI: 10.2320/matertrans.48.975 Document Type: Conference Paper

Times cited : (8)

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