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Volumn , Issue , 2006, Pages 1618-1621

A microfabricated near-field scanned microwave probe for noncontact dielectric constant metrology of low-k films

Author keywords

Dielectric films; Microscopy; Nondestructive testing; Permittivity measurement; Stripline resonators

Indexed keywords

DIELECTRIC RESONATORS; MICROWAVES; NATURAL FREQUENCIES; NONDESTRUCTIVE EXAMINATION; PERMITTIVITY MEASUREMENT; SILICON WAFERS; STRIP TELECOMMUNICATION LINES;

EID: 34250315809     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2006.249647     Document Type: Conference Paper
Times cited : (6)

References (19)
  • 3
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    • A. Braun, Semicond. Intl., vol. 28, No. 5, p. 41, May 2005.
    • (2005) Semicond. Intl , vol.28 , Issue.5 , pp. 41
    • Braun, A.1
  • 4
    • 33645515472 scopus 로고    scopus 로고
    • V. V. Talanov, A. Scherz, R. L. Moreland, A.R. Schwartz, Appl. Phys. Lett., 88(13), Mar 2006, in press.
    • V. V. Talanov, A. Scherz, R. L. Moreland, A.R. Schwartz, Appl. Phys. Lett., vol. 88(13), Mar 2006, in press.
  • 8
    • 12844282847 scopus 로고    scopus 로고
    • V. V. Talanov, R. L. Moreland, A. Scherz, A. R. Schwartz, Y. Liu, Mater. Res. Soc. Symp. Proc. 812, p. 73, 2004.
    • V. V. Talanov, R. L. Moreland, A. Scherz, A. R. Schwartz, Y. Liu, Mater. Res. Soc. Symp. Proc. 812, p. 73, 2004.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.