Fabrication of Ultra Precision Optics by Numerically Controlled Local Wet Etching

CIRP Annals - Manufacturing Technology

Volumn 56, Issue 1, 2007, Pages 541-544

  Yamamura, K ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Etching; Numerical control; Optical

Indexed keywords

FUNCTIONALLY GRADED MATERIALS; GEOMETRICAL OPTICS; NOZZLES; PHOTOMASKS; SURFACE ROUGHNESS; WET ETCHING;

DWELLING TIME; LOCAL WET ETCHING (LWE); SYNTHETIC QUARTZ GLASS; ULTRAPRECISION OPTICS;

MICROFABRICATION;

EID: 34250166534     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2007.05.129     Document Type: Article

References (9)

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