Morphology and growth of e-beam deposited YSZ thin films

Vacuum

Volumn 81, Issue 10, 2007, Pages 1288-1291

  Laukaitis, G ^a   Dudonis, J ^a   Milcius, D ^b  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b LITHUANIAN ENERGY INSTITUTE   (Lithuania)

Author keywords

EB PVD; Microstructure; YSZ thin films

Indexed keywords

CRYSTALLITE SIZE; DEPOSITION; ELECTRON BEAMS; FILM GROWTH; MICROSTRUCTURE; PHYSICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; YTTRIA STABILIZED ZIRCONIA;

CERAMIC POWDERS; SUBSTRATE TEMPERATURE; SUBSURFACE LAYERS;

THIN FILMS;

EID: 34249936134     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.01.030     Document Type: Article

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