Fabrication of silicon-on-insulator MEM resonators with deep sub-micron transduction gaps

Microsystem Technologies

Volumn 13, Issue 11-12, 2007, Pages 1489-1493

  Ciressan, Nicoleta Diana Badila ^a   Hibert, Cyrille ^a   Mazza, Marco ^a   Ionescu, Adrian M ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; EXCITONS; MEMS; PHOTOLITHOGRAPHY; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES;

BULK LATERAL RESONATORS (BLR); LATERAL ELECTRODES; SUSPENDED MASS; TRANSDUCTION GAPS;

RESONATORS;

EID: 34249816186     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0349-y     Document Type: Conference Paper

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