Surface modification of titanium nitride film by a picosecond Nd:YAG laser

Journal of Optics A: Pure and Applied Optics

Volumn 9, Issue 6, 2007, Pages

  Gakovic B ^a   Trtica, M ^a   Batani, D ^b   Desai, T ^b   Panjan, P ^c   Vasiljevic Radovic D ^d  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b UNIVERSITY OF MILANO BICOCCA   (Italy)

^c JO EF STEFAN INSTITUTE   (Slovenia)

^d UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Laser induced surface modification; Micro and nano periodical structure; Picoseconds laser pulse; Titanium nitride film

Indexed keywords

LASER PULSES; NEODYMIUM LASERS; PERIODIC STRUCTURES; SURFACE ROUGHNESS; SURFACE STRUCTURE; SURFACE TREATMENT; TITANIUM NITRIDE;

FILM EXFOLIATION; LASER INDUCED SURFACE MODIFICATION; MICRO PERIODICAL STRUCTURE; NANO PERIODICAL STRUCTURE; PICOSECONDS LASER PULSES;

THIN FILMS;

EID: 34249726737     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/9/6/S11     Document Type: Article

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