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Volumn 343-344, Issue 1-2, 1999, Pages 269-272
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TEA CO2 laser-induced damage of low-thickness TiN coatings
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Author keywords
Coatings; Laser ablation; Surface morphology; Titanium nitride
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Indexed keywords
CARBON DIOXIDE LASERS;
ENERGY DISPERSIVE SPECTROSCOPY;
LASER ABLATION;
LASER MODES;
LASER PULSES;
MORPHOLOGY;
SCANNING ELECTRON MICROSCOPY;
SPUTTER DEPOSITION;
TITANIUM NITRIDE;
TRANSVERSELY EXCITED ATMOSPHERIC (TEA) LASER ABLATION;
CERAMIC COATINGS;
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EID: 0032686163
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(98)01571-5 Document Type: Article |
Times cited : (11)
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References (11)
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