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Volumn 343-344, Issue 1-2, 1999, Pages 269-272

TEA CO2 laser-induced damage of low-thickness TiN coatings

Author keywords

Coatings; Laser ablation; Surface morphology; Titanium nitride

Indexed keywords

CARBON DIOXIDE LASERS; ENERGY DISPERSIVE SPECTROSCOPY; LASER ABLATION; LASER MODES; LASER PULSES; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TITANIUM NITRIDE;

EID: 0032686163     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01571-5     Document Type: Article
Times cited : (11)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.