Nano-second surface modification of titanium nitride thin film by Nd:YAG and TEA CO2 lasers

Materials Science Forum

Volumn 518, Issue , 2006, Pages 161-166

  Gakovic B ^a   Pongrac, I ^b   Petrovic S ^a   Minic D ^b   Trtica, M ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Nd:YAG laser; OM; SEM; TEA CO2 laser; TiN thin film

Indexed keywords

LASER PULSES; LASER RADIATION; PHYSICAL VAPOR DEPOSITION; SILICON; SURFACE TREATMENT; TITANIUM NITRIDE;

EXFOLIATION; TITANIUM NITRIDE THIN FILMS;

THIN FILMS;

EID: 34249665691     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.518.161     Document Type: Conference Paper

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