Micro-pressure sensors made of indium tin oxide thin films

Sensors and Actuators, A: Physical

Volumn 137, Issue 1, 2007, Pages 1-5

  Yeung, Kai Wah ^a   Ong, Chung Wo ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

Indium tin oxide; Magnetron sputtering; Piezoresistive property; Pressure sensors

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; MICROSTRUCTURE; THIN FILMS; VOLTAGE CONTROL;

INDIUM TIN OXIDE; PIEZORESISTIVE COEFFICIENT; PIEZORESISTIVE PROPERTY; POST-ANNEALING CONDITIONS; THICK SILICON DIAPHRAGM;

PRESSURE SENSORS;

EID: 34249335359     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.01.012     Document Type: Article

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