Thermo-mechanical behavior of buckled multi-layered micro-bridges

Sensors and Actuators, A: Physical

Volumn 137, Issue 1, 2007, Pages 157-168

  Michael, Aron ^a   Kwok, Chee Yee ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Buckling; Micro bridge; Multi layer; Snap through; Thermo mechanical model

Indexed keywords

BUCKLING; COMPUTER SIMULATION; RESIDUAL STRESSES; SILICON; STRESS ANALYSIS; THERMOMECHANICAL TREATMENT;

AXIAL STIFFNESS; MICROBRIDGE; SNAP THROUGH;

MULTILAYERS;

EID: 34249322668     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.02.029     Document Type: Article

References (17)

1. Hoffmann M., et al. Bistable micromechanical fiber-optic switches on silicon with thermal actuator. Sens. Actuators A 78 (1999) 28-35
2. Jain A., et al. A thermal bimorph micro mirror with large bi-directional and vertical actuation. Sens. Actuators A 122 (2005) 9-15
3. Matoba H., et al. A Bistable Snapping Microactuator Microactuator, Proceedings IEEE Works Workshop on MEMS Hop MEMS. Japan (1994) 45-50
4. Al Aioubi M.L., et al. Deflection and load characterization of bimorph actuators for bioMEMS and other applications. J. Microelectron. Eng. 73-74 (2004) 898-903
5. Timoshenko S. Analysis of Bi-metal thermostats. J. Opt. Soc. Am. 11 (1925) 233-455
6. David B., and Philip J.M. Thermal buckling of a bimetallic beam. Proceedings of the American Society of Civil Engineers. EM-2. J. Eng. Mech. Div. (1969) 421-433
7. David B., and David R. Higher mode buckling of bimetallic beam. Proceedings of the American Society of Civil Engineers. EM-4. J. Eng. Mech. Div. (1971) 1045-1055
8. Cabal A., and Ross D.S. Snap-Through Bilayer Microbeam, Conference in Modeling and Simulation of Microsystems (2002) 230-233
9. Meng Q., and Mehregany M. Theoretical modeling of micro-fabricated beams with elastically restrained supports. IEEE/ASME J. MEMS 2 (1993) 128-137
10. Michael A., and Kwok C.Y. Design criteria for Bi-stable behavior of buckled multi-layered MEMS bridges. J. Micromech. Microeng. 16 (2006) 2034-2043
11. Chenpeng H., and Wensyang H. A two-way membrane-type micro- actuator with continuous deflections. J. Micromech. Microeng. 10 (2000) 387-394
12. Aron Michael, et al. Out of Plane Electro-Thermally Actuated Bistable Buckled Micro-Bridge, Proceedings of IEEE Sensor. California, USA (2005) 596-599
13. Sulfridge M., et al. Optical actuation of a bistable MEMS. IEEE/ASME J. MEMS 11 (2000) 574-583
14. Okada Y., and Tokumaru Y. Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 K. J. Appl. Phys. 56 (1984) 314-320
15. Geisberger A.A., et al. Electrothermal properties and modeling of polysilicon microthermal actuators. IEEE/ASME J. MEMS 12 (2003) 513-523
16. Ono N., et al. Measurement of young's modulus of silicon single crystal at high temperature and its dependency on boron concentration using flexural vibration method. Jpn. J. Appl. Phys. 39 (2000) 368-371
17. Peroulis D., et al. Electromechanical considerations in developing low-voltage RF MEMS switches. IEEE Trans. Microwave Theory Techn. 51 (2003) 259-270