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Volumn 2005, Issue , 2005, Pages 596-599

Out-of-plane electrothermally actuated bistable buckled microbridge actuator

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; COMPUTER SIMULATION; FINITE ELEMENT METHOD; SPRINGS (COMPONENTS); STIFFNESS; TORSIONAL STRESS;

EID: 33748763102     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597769     Document Type: Conference Paper
Times cited : (8)

References (7)
  • 1
    • 0031236013 scopus 로고    scopus 로고
    • Vertical mirrors fabricated by deep reactive ion etching for fiber optic switching applications
    • Sep
    • C.Marxer, C.Thio, M.A.Gretillat, N.F.derooij, R.battig, O.Anthamatten, B.valk, and P.vogel, "Vertical mirrors fabricated by deep reactive ion etching for fiber optic switching applications", J.MEMS,Vol 6, No.3, pp. 277-285, Sep 1997.
    • (1997) J.MEMS , vol.6 , Issue.3 , pp. 277-285
    • Marxer, C.1    Thio, C.2    Gretillat, M.A.3    derooij, N.F.4    battig, R.5    Anthamatten, O.6    valk, B.7    vogel, P.8
  • 3
    • 0034452938 scopus 로고    scopus 로고
    • Self aligned micromaching process for large-scale, free space optical cross connects
    • P.Helin, M.Mita, T.bourouina, G.Reyne, and H.Fujita, "Self aligned micromaching process for large-scale, free space optical cross connects", IEEE Journal of light wave technology, vol 18, no.12, pp.1785-1791, 2000.
    • (2000) IEEE Journal of light wave technology , vol.18 , Issue.12 , pp. 1785-1791
    • Helin, P.1    Mita, M.2    bourouina, T.3    Reyne, G.4    Fujita, H.5
  • 5
    • 0032654580 scopus 로고    scopus 로고
    • Free space micromachined optical switch for optical interconnect
    • Jan
    • L.Y.Lin, E.L.Goldstein,"Free space micromachined optical switch for optical interconnect", IEEE J.selected topic in quantum electronics, vol 5, No 1, Jan 1999, pp 4-9.
    • (1999) IEEE J.selected topic in quantum electronics , vol.5 , Issue.1 , pp. 4-9
    • Lin, L.Y.1    Goldstein, E.L.2
  • 6
    • 0027668578 scopus 로고
    • Theorectical modeling of microfabricated beams with elastically restrained supports
    • Sep
    • Q.Meng, M.Mehregany "Theorectical modeling of microfabricated beams with elastically restrained supports", J.MEMS, vol 2, No 3, pp 128-137, Sep 1993..
    • (1993) J.MEMS , vol.2 , Issue.3 , pp. 128-137
    • Meng, Q.1    Mehregany, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.