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Volumn 6598, Issue , 2007, Pages

Application of laser plasma soft X-ray and EUV sources in micro- And nanotechnology

Author keywords

EUV; Microstructures; Photo etching; X rays

Indexed keywords

LASER PRODUCED PLASMAS; NANOTECHNOLOGY; ORGANIC POLYMERS; ULTRAVIOLET RADIATION; X RAYS;

EID: 34249065206     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726547     Document Type: Conference Paper
Times cited : (2)

References (14)
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    • (1995) Appl. Phys. Lett , vol.67 , pp. 872
    • Zhang, Y.1    Katoh, T.2    Washio, M.3    Yamada, H.4    Hamada, S.5
  • 6
    • 0000951834 scopus 로고    scopus 로고
    • Enhanced X-ray emission in the 1-keV range from a laser-irradiated gas puff target produced using the double nozzle setup
    • H. Fiedorowicz, A. Bartnik, R. Jarocki, R. Rakowski, M. Szczurek, "Enhanced X-ray emission in the 1-keV range from a laser-irradiated gas puff target produced using the double nozzle setup" Applied Physics B 70 (2000) 305
    • (2000) Applied Physics B , vol.70 , pp. 305
    • Fiedorowicz, H.1    Bartnik, A.2    Jarocki, R.3    Rakowski, R.4    Szczurek, M.5
  • 10
    • 30844444796 scopus 로고    scopus 로고
    • H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, R. Rakowski, M. Szczurek, Compact and debrisfree laser plasma soft x-ray source based on a gas puff target in Proc. SPIE 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II; Eds. George A. Kyrala, Jean-Claude J. Gauthier, Carolyn A. MacDonald, Ali M. Khounsary (SPIE Press Bellingham, 2005) - in print
    • H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, R. Rakowski, M. Szczurek, "Compact and debrisfree laser plasma soft x-ray source based on a gas puff target" in Proc. SPIE vol. 5918, Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II; Eds. George A. Kyrala, Jean-Claude J. Gauthier, Carolyn A. MacDonald, Ali M. Khounsary (SPIE Press Bellingham, 2005) - in print
  • 12
    • 32844462204 scopus 로고    scopus 로고
    • Strong temperature effect on x-ray photo-etching of polytetrafluoroethylene using a 10 Hz laser-plasma radiation source based on a gas puff target
    • A. Bartnik, H. Fiedorowicz, R. Jarocki, L. Juha, J. Kostecki, R. Rakowski, M. Szczurek, "Strong temperature effect on x-ray photo-etching of polytetrafluoroethylene using a 10 Hz laser-plasma radiation source based on a gas puff target" Applied Physics B 82 (2006) 529
    • (2006) Applied Physics B , vol.82 , pp. 529
    • Bartnik, A.1    Fiedorowicz, H.2    Jarocki, R.3    Juha, L.4    Kostecki, J.5    Rakowski, R.6    Szczurek, M.7
  • 13
    • 34249041861 scopus 로고    scopus 로고
    • private communication
    • J. Heitz (private communication)
    • Heitz, J.1
  • 14
    • 42149153910 scopus 로고    scopus 로고
    • L. Sveda, L. Pina, A. Inneman, V. Semencova, J. Marsik, R. Hudec, A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, R. Rakowski, M. Szczurek, Multi-foil optic condenser for a laser plasma EUV source Phys. Scr. T123 (2006) 131
    • L. Sveda, L. Pina, A. Inneman, V. Semencova, J. Marsik, R. Hudec, A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, R. Rakowski, M. Szczurek, "Multi-foil optic condenser for a laser plasma EUV source" Phys. Scr. T123 (2006) 131


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.