Influence of substrate temperature on the optical and piezoelectric properties of ZnO thin films deposited by rf magnetron sputtering

Applied Surface Science

Volumn 253, Issue 17, 2007, Pages 7330-7335

  Kang, Seong Jun ^a   Joung, Yang Hee ^a  

^a Chonnam National University   (South Korea)

Author keywords

Piezoelectric constant; Refractive index; rf sputtering; ZnO thin film

Indexed keywords

CRYSTALLIZATION; MAGNETRON SPUTTERING; PIEZOELECTRICITY; REFRACTIVE INDEX; SPECTROPHOTOMETRY; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; ZINC OXIDE;

PIEZOELECTRIC CONSTANT; PNEUMATIC LOADING METHOD (PLM); SELLMEIR DISPERSION; SUBSTRATE TEMPERATURE;

THIN FILMS;

EID: 34249046457     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.03.020     Document Type: Article

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