Effect of substrate bias voltage on corrosion of TiN/Ti multilayers deposited by magnetron sputtering

Applied Surface Science

Volumn 253, Issue 17, 2007, Pages 7192-7196

  Flores, M ^a   Huerta, L ^b   Escamilla, R ^b   Andrade, E ^c   Muhl, S ^b  

^a UNIVERSITY OF GUADALAJARA   (Mexico)

^b INSTITUTO DE INVESTIGACIONES EN MATERIALES   (Mexico)

^c UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

Bias; Corrosion; Magnetron sputtering; TiN Ti

Indexed keywords

BIAS VOLTAGE; CORROSION RESISTANCE; MAGNETRON SPUTTERING; POTENTIODYNAMIC POLARIZATION; STAINLESS STEEL; SUBSTRATES; TITANIUM NITRIDE;

IMPERMEABILITY; LOCALIZED CORROSION; PITTING CORROSION;

MULTILAYERS;

EID: 34249020526     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.02.203     Document Type: Article

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