Ti/TiN multilayers for hard coatings applications: In-situ characterization by real time spectroscopic ellipsometry

Surface and Coatings Technology

Volumn 100-101, Issue 1-3, 1998, Pages 491-495

  Boher, Pierre ^a   Stehle, Jean Louis ^a   Labdi, Sid ^b   Houdy, Philippe ^b  

^a SOPRA   (France)

^b UNIVERSITÉ D EVRY VAL D ESSONNE   (France)

Author keywords

Hard coatings; Realtime control; Spectroscopic ellipsometry

Indexed keywords

COATINGS; ELLIPSOMETRY; INTERDIFFUSION (SOLIDS); REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS; SPUTTER DEPOSITION; THICK FILMS; THICKNESS MEASUREMENT; TITANIUM; TITANIUM NITRIDE; WEAR OF MATERIALS;

HARD COATINGS; REAL TIME CONTROL; SPECTROSCOPIC ELLIPSOMETRY (SE);

MULTILAYERS;

EID: 0032026756     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00677-4     Document Type: Article

References (7)

1. U. Helmersson, T. Todorova, L. Marbert, S.A. Barnett, J.E. Sundgren, J.E. Geene, J. Appl. Phys. 62 (1987) 481.
2. J.E. Sundgren, J. Birch, G. Hakansson, L. Hultman, U. Helmersson, Thin Solid Films 193194 (1990) 818.
3. H. Holleck, H. Schulz, Thin Solid Films 153 (1987) 11.
4. Y. Ding, Z. Farhat, D.O. Northwood, A.T. Alpas, Surf. Coat. Technol. 6869 (1994) 459.
5. S.J. Bull, A.M. Jones, Surf. Coat. Technol. 78 (1996) 173.
6. P. Houdy, P. Psyllaki, S. Labdi, K. Suenaga, M. Jeandin, Mat. Res. Soc. Symp. Proc. 434 (1996) 57.
7. S. Labdi, P. Houdy, P. Psyllaki, M. Jeandin, Thin Solid Films (1995).