Enhancement of sp3-bonding in high-bias-voltage grown diamond-like carbon thin films studied by x-rayabsorption and photoemission spectroscopy

Journal of Physics Condensed Matter

Volumn 19, Issue 17, 2007, Pages

  Ray, S C ^a   Pao, C W ^a   Tsai, H M ^a   Chiou, J W ^a   Pong, W F ^a   Tsai, M H ^b   Okpalugo, T I T ^c   Papakonstantinou, P ^c   Pi, T W ^d  

^a TAMKANG UNIVERSITY   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^c UNIVERSITY OF ULSTER   (United Kingdom)

^d NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELASTIC MODULI; FILM GROWTH; PHOTOELECTRON SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; X RAY ABSORPTION NEAR EDGE STRUCTURE SPECTROSCOPY;

BIAS VOLTAGES; CARBON ATOMS; VAPOUR PRECURSORS;

DIAMOND LIKE CARBON FILMS;

EID: 34249020410     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/19/17/176204     Document Type: Article

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