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Volumn 43, Issue 6, 2007, Pages 2666-2671

Materials optimization for magnetic MEMS

Author keywords

Magnetic layered films; Magnetostrictive devices; Microelectromechanical devices

Indexed keywords

MAGNETIC FILMS; MAGNETOSTRICTIVE DEVICES; OPTIMIZATION;

EID: 34248994568     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2007.893764     Document Type: Article
Times cited : (20)

References (29)
  • 1
    • 0141930312 scopus 로고    scopus 로고
    • Magnetic micro-actuators and systems (MAGMAS)
    • Nov
    • O. Cugat, J. Delamare, and G. Reyne, "Magnetic micro-actuators and systems (MAGMAS)," IEEE Trans Magn., vol. 39, no. 6, pp. 3607-3612, Nov. 2003.
    • (2003) IEEE Trans Magn , vol.39 , Issue.6 , pp. 3607-3612
    • Cugat, O.1    Delamare, J.2    Reyne, G.3
  • 2
    • 0035689377 scopus 로고    scopus 로고
    • Microelectromechanical systems (MEMS): Fabrication design and applications
    • J. W. Judy, "Microelectromechanical systems (MEMS): Fabrication design and applications," Smart Mater. Struct., vol. 10, pp. 1115-1134, 2001.
    • (2001) Smart Mater. Struct , vol.10 , pp. 1115-1134
    • Judy, J.W.1
  • 4
    • 0026882942 scopus 로고
    • The case for magnetically-driven micro-actuators
    • I. J. Busch-Vishniac, "The case for magnetically-driven micro-actuators," Sens. Actuators A: Phys., vol. 33, pp. 207-220, 1992.
    • (1992) Sens. Actuators A: Phys , vol.33 , pp. 207-220
    • Busch-Vishniac, I.J.1
  • 5
    • 0042638146 scopus 로고    scopus 로고
    • Magnetic microsensors: Technology, properties, applications
    • I. Bolshakova, "Magnetic microsensors: Technology, properties, applications," Sens. Actuators A: Phys., vol. 68, pp. 282-285, 1998.
    • (1998) Sens. Actuators A: Phys , vol.68 , pp. 282-285
    • Bolshakova, I.1
  • 7
    • 0032096826 scopus 로고    scopus 로고
    • Magnetoelastic characterization of thin films dedicated to magnetomechanical microsensor applications
    • H. Chiriac, M. Pletea, and E. Hristoforou, "Magnetoelastic characterization of thin films dedicated to magnetomechanical microsensor applications," Sens. Actuators A: Phys., vol. 68, pp. 414-418, 1998.
    • (1998) Sens. Actuators A: Phys , vol.68 , pp. 414-418
    • Chiriac, H.1    Pletea, M.2    Hristoforou, E.3
  • 8
    • 0033903139 scopus 로고    scopus 로고
    • Fe-based amorphous thin film as a magnetoelastic sensor material
    • H. Chiriac, M. Pletea, and E. Hristoforou, "Fe-based amorphous thin film as a magnetoelastic sensor material," Sens. Actuators A: Phys., vol. 81, pp. 166-169, 2000.
    • (2000) Sens. Actuators A: Phys , vol.81 , pp. 166-169
    • Chiriac, H.1    Pletea, M.2    Hristoforou, E.3
  • 9
    • 0001297540 scopus 로고    scopus 로고
    • Finite-element modelling of magnetostrictive bending of a coated cantilever
    • R. Watts, M. R. J. Gibbs, W. J. Karl, and H. Szymczak, "Finite-element modelling of magnetostrictive bending of a coated cantilever," Appl. Phys. Lett., vol. 70, pp. 2607-2609, 1997.
    • (1997) Appl. Phys. Lett , vol.70 , pp. 2607-2609
    • Watts, R.1    Gibbs, M.R.J.2    Karl, W.J.3    Szymczak, H.4
  • 10
    • 31344465215 scopus 로고    scopus 로고
    • Finite-element analysis on cantilever beams coated with magnetostrictive material
    • Feb
    • J. Dean, M. R. J. Gibbs, and T. Schrefl, "Finite-element analysis on cantilever beams coated with magnetostrictive material," IEEE Trans. Magn., vol. 42, no. 2, pp. 283-288, Feb. 2006.
    • (2006) IEEE Trans. Magn , vol.42 , Issue.2 , pp. 283-288
    • Dean, J.1    Gibbs, M.R.J.2    Schrefl, T.3
  • 11
    • 0030779355 scopus 로고    scopus 로고
    • Modeling of magnetostrictive thin films, application to a micromembrane
    • C. Body, G. Reyne, and G. Meunier, "Modeling of magnetostrictive thin films, application to a micromembrane," J. Phys. III Fiance, vol. 7, pp. 67-85, 1997.
    • (1997) J. Phys. III Fiance , vol.7 , pp. 67-85
    • Body, C.1    Reyne, G.2    Meunier, G.3
  • 12
    • 0020116896 scopus 로고    scopus 로고
    • Magnetomechanical properties of amorphous metals
    • J. D. Livingston, "Magnetomechanical properties of amorphous metals," Phys. Stat. Sol. A., vol. 70, pp. 591-596, 1997.
    • (1997) Phys. Stat. Sol. A , vol.70 , pp. 591-596
    • Livingston, J.D.1
  • 14
    • 0024738484 scopus 로고
    • ΔE effect in obliquely field-annealed METGLAS® 2605SC
    • Sep
    • P. T. Squire and M. R. J. Gibbs, "ΔE effect in obliquely field-annealed METGLAS® 2605SC," IEEE Trans. Magn., vol. 25, no. 5, pp. 3614-3616, Sep. 1989.
    • (1989) IEEE Trans. Magn , vol.25 , Issue.5 , pp. 3614-3616
    • Squire, P.T.1    Gibbs, M.R.J.2
  • 15
    • 0000488952 scopus 로고    scopus 로고
    • Remote query pressure measurement using magnetoelastic sensors
    • C. A. Grimes, P. G. Stoyanov, D. Kouzoudis, and K. G. Ong, "Remote query pressure measurement using magnetoelastic sensors," Rev. Sci. Instrum., vol. 70, pp. 4711-4714, 1999.
    • (1999) Rev. Sci. Instrum , vol.70 , pp. 4711-4714
    • Grimes, C.A.1    Stoyanov, P.G.2    Kouzoudis, D.3    Ong, K.G.4
  • 16
    • 0026743626 scopus 로고
    • Anisotropy and magnetostriction in metallic glasses
    • A. P. Thomas and M. R. J. Gibbs, "Anisotropy and magnetostriction in metallic glasses," J. Magn. Magn. Mater., vol. 103, pp. 97-110, 1992.
    • (1992) J. Magn. Magn. Mater , vol.103 , pp. 97-110
    • Thomas, A.P.1    Gibbs, M.R.J.2
  • 18
    • 0032477036 scopus 로고    scopus 로고
    • The use of stress for the control of magnetic anisotropy in amorphous FeSiBC thin films: A magneto-optic study
    • M. Ali, R. Watts, W. J. Karl, and M. R. J. Gibbs, "The use of stress for the control of magnetic anisotropy in amorphous FeSiBC thin films: A magneto-optic study," J. Magn. Magn. Mater., vol. 190, pp. 199-204, 1998.
    • (1998) J. Magn. Magn. Mater , vol.190 , pp. 199-204
    • Ali, M.1    Watts, R.2    Karl, W.J.3    Gibbs, M.R.J.4
  • 19
    • 34249046212 scopus 로고    scopus 로고
    • Available:, Accessed Oct. 17, 2006
    • [Online]. Available: www.metglas.com. Accessed Oct. 17, 2006
  • 20
    • 36849134797 scopus 로고
    • Magnetic anisotropy and magnetostriction of ordered and disordered cobalt-iron alloys
    • R. C. Hall, "Magnetic anisotropy and magnetostriction of ordered and disordered cobalt-iron alloys," J. Appl. Phys., vol. 31, pp. 157S-158S, 1960.
    • (1960) J. Appl. Phys , vol.31
    • Hall, R.C.1
  • 21
    • 34249093751 scopus 로고    scopus 로고
    • Available: Accessed Oct. 17, 2006
    • [Online]. Available: www.vacuumschmelze.de Accessed Oct. 17, 2006
  • 22
    • 0035575543 scopus 로고    scopus 로고
    • Sputter deposition of compositional gradient magnetostrictive FeCo based thin films
    • M. D. Cooke, M. R. J. Gibbs, and R. F. Pettifer, "Sputter deposition of compositional gradient magnetostrictive FeCo based thin films," J. Magn. Magn. Mater., vol. 237, pp. 175-180, 2001.
    • (2001) J. Magn. Magn. Mater , vol.237 , pp. 175-180
    • Cooke, M.D.1    Gibbs, M.R.J.2    Pettifer, R.F.3
  • 23
    • 0034260431 scopus 로고    scopus 로고
    • Magnetostrictive properties of body-centered cubic Fe-Ga and Fe-Ga-Al alloys
    • Sep
    • A. E. Clarke, J. B. Restorff, M. Wun-Fogle, T. A. Lograsso, and D. L. Schlagel, "Magnetostrictive properties of body-centered cubic Fe-Ga and Fe-Ga-Al alloys," IEEE Trans. Magn., vol. 36, no. 5, pp. 3238-3240, Sep. 2000.
    • (2000) IEEE Trans. Magn , vol.36 , Issue.5 , pp. 3238-3240
    • Clarke, A.E.1    Restorff, J.B.2    Wun-Fogle, M.3    Lograsso, T.A.4    Schlagel, D.L.5
  • 25
    • 36449008170 scopus 로고
    • Fabrication of magnetostriction actuators using rare-earth (Tb,Sm)-Fe thin films (invited)
    • T. Honda, K. I. Aria, and M. Yamaguchi, "Fabrication of magnetostriction actuators using rare-earth (Tb,Sm)-Fe thin films (invited)," J. Appl. Phys., vol. 76, pp. 6994-6999, 1994.
    • (1994) J. Appl. Phys , vol.76 , pp. 6994-6999
    • Honda, T.1    Aria, K.I.2    Yamaguchi, M.3
  • 26
    • 0031072540 scopus 로고    scopus 로고
    • Basic properties of magnetostictive actuators using Tb-Fe and Sm-Fe thin films
    • T. Honda, K. I. Aria, and M. Yamaguchi, "Basic properties of magnetostictive actuators using Tb-Fe and Sm-Fe thin films," IEICE Trans. Electron., vol. 80, pp. 232-238, 1997.
    • (1997) IEICE Trans. Electron , vol.80 , pp. 232-238
    • Honda, T.1    Aria, K.I.2    Yamaguchi, M.3
  • 27
    • 1642404896 scopus 로고    scopus 로고
    • Strain and stress calculation in bulk magnetostrictive materials and thin films
    • V. H. Guerrero and R. C. Wetherhold, "Strain and stress calculation in bulk magnetostrictive materials and thin films," J. Magn. Magn. Mater., vol. 271, pp. 190-206, 2004.
    • (2004) J. Magn. Magn. Mater , vol.271 , pp. 190-206
    • Guerrero, V.H.1    Wetherhold, R.C.2
  • 29
    • 34249067573 scopus 로고    scopus 로고
    • private communication
    • S. L. McArthur, private communication.
    • McArthur, S.L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.