Structural properties of iron oxynitride films obtained by reactive magnetron sputtering

Journal of Physics Condensed Matter

Volumn 19, Issue 22, 2007, Pages

  Grafoute M ^a   Petitjean, C ^a   Rousselot, C ^a   Pierson, J F ^b   Greneche J M ^c  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b INSTITUT JEAN LAMOUR   (France)

^c UNIVERSITÉ DU MAINE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; FLOW RATE; IRON COMPOUNDS; MAGNETRON SPUTTERING; OXYGEN; PRESSURE EFFECTS; STRUCTURAL PROPERTIES;

ARGON PRESSURE; FILMS DEPOSITION; IRON OXYNITRIDE;

THIN FILMS;

EID: 34248635430     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/19/22/226207     Document Type: Conference Paper

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