Machining hole arrays in polyimide using a UV solid state laser and predetermined temporal pulse patterns

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6459, Issue , 2007, Pages

  Mullan, Claire ^a   Ilie, Diana ^a   O'Connor, Gerard M ^a   Favre, Sebastian ^a   Glynn, Thomas J ^a  

^a NATIONAL UNIVERSITY OF IRELAND   (Ireland)

Author keywords

Hole arrays; Laser drilling; Polyimide; Pulse picker; UV

Indexed keywords

LASER BEAMS; MACHINING; OPTICAL SWITCHES; PHOTODIODES; SOLID STATE LASERS;

HOLE ARRAYS; HOLE SIZE; PULSE PATTERNS; THERMAL DAMAGE;

POLYIMIDES;

EID: 34248562898     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.700592     Document Type: Conference Paper

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