Estimating spot size and relating hole diameters with fluence and number of shots for nanosecond and femtosecond laser ablation of polyethylene terephthalate

Journal of Laser Applications

Volumn 19, Issue 3, 2007, Pages 158-164

  Mullan, Claire ^a   O'Connor, Gerard M ^a   Favre, Sebastian ^a   Ilie, Diana ^a   Glynn, Thomas J ^a  

^a NATIONAL UNIVERSITY OF IRELAND   (Ireland)

Author keywords

Femtosecond; Hole diameter; Laser ablation; Nanosecond; Spot size

Indexed keywords

ESTIMATION; GAUSSIAN BEAMS; LASER BEAMS; POLYETHYLENE TEREPHTHALATES; ULTRASHORT PULSES;

FEMTOSECOND LASER ABLATION; GAUSSIAN LASER BEAM; HOLE DIAMETER; NANOSECOND LASER ABLATION; SPOT SIZE;

LASER ABLATION;

EID: 34548550605     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.2567797     Document Type: Article

References (19)

1. J. Hawkes and I. Latimer, Lasers Theory and Practice (Prentice Hall, Hemel Hempstead, UK, 1995).
2. ISO 11146- 1, Lasers and laser-related equipment - Test methods for laser beam widths, divergence angles, and beam propagation ratios.
3. H. Howard, A. J. Conneely, G. M. O'Connor, and T. J. Glynn, "Investigation of a method for the determination of the focused spot size of industrial laser beams based on the drilling of holes in mylar film," Proceedings of Opto-Ireland 2002: Optics and Photonics Technologies and Applications, edited by T. J. Glynn (SPIE, Bellingham, WA, 2003), Vol. 4876, pp. 541-552.
4. T. Lippert, E. Ortelli, J. C. Panitz, F. Raimondi, J. Wambach, J. Wei, and A. Wokaun, "Imaging-XPS/Raman investigation on the carbonization of polyimide after irradiation at 308 nm," Appl. Phys. A: Mater. Sci. Process. 69, S651-S654 (1999).
5. T. Lippert, M. Hauer, C. R. Phipps, and A. Wokaun, "Fundamentals and applications of polymers designed for laser ablation," Appl. Phys. A: Mater. Sci. Process. 77, 259-264 (2003).
6. T. Lippert, "Interaction of photons with polymers: From surface modification to ablation," Plasma Processes Polym. 2, 525-546 (2005).
7. P. Mannion, J. Magee, E. Coyne, and G. M. O'Connor, "Ablation thresholds in ultrafast laser micromachining of common metals in air," Proceedings of Opto-Ireland 2002: Optics and Photonics Technologies and Applications, edited by T. J. Glynn (SPIE, Bellingham, WA, 2003), Vol. 4876, pp. 470-478.
8. S. Nolte, C. Momma, H. Jacobs, A. Tunnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling, "Ablation of metals by ultrashort laser pulses," J. Opt. Soc. Am. B 14, 2716-2722 (1997).
9. N. Mansour and K. J. Ghaleh, "Ablation of polyethylene terephthalate at 266 nm," Appl. Phys. A: Mater. Sci. Process. 74, 63-67 (2002).
10. Z. Y. Wang, J. T. Liu, D. M. Hirak, D. C. Weckman, and H. W. Kerr, "Determining the spot size and Gaussian distribution coefficient of pulsed laser beams using Kapton films," J. Laser Appl. 5, 5-12 (1993).
11. X. Liu, D. Du, and G. Mourou, "Laser ablation and micromachining with ultrashort laser pulses," IEEE J. Quantum Electron. 33, 1706-1716 (1997).
12. B. Luk'yanchuk, N. Bityurin, M. Himmelbauer, and N. Arnold, "UV-Iaser ablation of polyimide: from long to ultra-short laser pulses," Nucl. Instrum. Methods Phys. Res. B 122, 347-355 (1997).
13. P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, "Machining of sub-micron holes using a femtosecond laser at 800 nm," Opt. Commun. 114, 106-110 (1995).
14. F. C. Burns and S. R. Cain, "The effect of pulse repetition rate on laser ablation of polyimide and polymethylmethacrylate-based polymers," J. Phys. D 29, 1349-1355 (1996).
15. P. T. Mannion, J. Magee, E. Coyne, G. M. O'Connor, and T. J. Glynn, "The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air," Appl. Surf. Sci. 233, 275-287 (2004).
16. C. Mullan, D. Ilie, S. Favre, G. M. O'Connor, and T. J. Glynn, "Percussion drilling of polyimide using VUV and UV solid state lasers," Proceedings of Opto-Ireland 2005: Photonic Engineering (SPIE, Dublin, Ireland, 2005), Vol. 5827, pp. 475-485.
17. J. Bonse, J. M. Wrobel, J. Kruger, and W. Kautek, "Ultrashort-pulse laser ablation of indium phosphide in air," Appl. Phys. A: Mater. Sci. Process. 72, 89-94 (2001).
18. S. Baudach, J. Bonse, and W. Kautek, "Ablation experiments on polyimide with femtosecond laser pulses," Appl. Phys. A: Mater. Sci. Process. 69, S395-S398 (1999).
19. Y. Jee, M. F. Becker, and R. M. Walser, "Laser-induced damage on single-crystal metal-surfaces," J. Opt. Soc. Am. B 5, 648-659 (1988).