Plasma effects during ablation and drilling using pulsed solid-state lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5121, Issue , 2002, Pages 24-33

  Breitling, Detlef ^a   Ruf, Andreas ^a   Berger, Peter W ^a   Dausinger, Friedrich H ^a   Klimentov, Sergei M ^b   Pivovarov, Pavel A ^b   Kononenko, Taras V ^b   Konov, Vitali I ^b  

^a UNIVERSITY OF STUTTGART   (Germany)

^b PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

Author keywords

Air breakdown; Laser ablation; Laser drilling; Material vapor; Nonlinear action; Plasma plumes; Resonance absorption photography; Shadowgraphy; Shock waves; Ultrashort pulses

Indexed keywords

PLASMAS; RESONANCE; SHOCK WAVES; SOLID STATE LASERS; ULTRASHORT PULSES;

LASER DRILLING; PLASMA PLUMES;

LASER ABLATION;

EID: 0344082802     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.513766     Document Type: Conference Paper

References (16)

1. B. Sallé, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, "Femtosecond and picosecond laser microablation: ablation efficiency and laser microplasma expansion," Appl. Phys. A 69S, pp. 381-383, 1999.
2. C. Föhl, D. Breitling, K. Jasper, J. Radtke, and F. Dausinger, "Precision drilling of metals and ceramics with short and ultrashort pulsed solid state lasers," in Second International Symposium on Laser Precision Microfabrication LPM 2001 (Singapore), I. Miyamoto, Y. F. Lu, K. Sugioka, and J. J. Dubowski, eds., Proc. SPIE 4426, pp. 104-107, Intl. Soc. for Optical Engineering, (Bellingham, WA), 2002.
3. B. Burghardt, S. Scheede, R. Senczuk, and H.-J. Kahlert, "Ablation plume effects on high precision eximer laser-based micromachining," Appl. Phys. A 69S, pp. 137-140, 1999.
4. F. Dausinger, T. Abeln, D. Breitling, J. Radke, V. Konov, S. Garnov, S. Klimentov, T. Kononenko, and O. Tsarkova, "Bohren keramischer Werkstoffe mit Kurzpuls-Festkörperlasern," LaserOpto 31(3), pp. 78-85, 1999.
5. T. Abeln, J. Radtke, and F. Dausinger, "High precision drilling with short-pulsed solid-state lasers," in Proc. Laser Microfabrication Conf. ICALEO '99 (San Diego, CA), P. Christensen, P. Herman, and R. Patel, eds., 88, pp. 195-203, Laser Institute of America (LIA), (Orlando, FL), 2000.
6. D. Breitling, H. Schittenhelm, P. Berger, F. Dausinger, and H. Hügel, "Shadowgraphic and interferometric investigations on Nd:YAG laser-induced vapor/plasma plumes for different processing wavelengths," in XIII Intl. Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference GCL/HPL 2000 (Florence, Italy), A. Lapucci and M. Ciofini, eds., Proc. SPIE 4184, pp. 534-538, Ind. Soc. for Optical Engineering, (Bellingham, WA), 2001.
7. D. Breitling, H. Schittenhelm, P. Berger, F. Dausinger, and H. Hügel, "Shadowgraphic and interferometric investigations on Nd:YAG laser-induced vapor/plasma plumes for different processing wavelengths," Appl. Phys. A 69S, pp. 505-508, 1999.
8. S. M. Klimentov, T. V. Kononenko, P. A. Pivovarov, S. V. Garnov, V. I. Konov, D. Breitling, and F. Dausinger, "Effect of nonlinear scattering of radiation in air on material ablation by femtosecond laser pulses," in Conference on Lasers, Applications, and Technologies LAT 2002 (Moscow, Russia), L. V. Lomonosov, A. A. Mak, and V. Y. Panchenko, eds., Proc. SPIE, Intl. Soc. for Optical Engineering, (Bellingham, WA). To be published in this volume.
9. 3," Appl. Phys. Lett. 49(21), pp. 1478-1480, 1986.
10. H. R. Griem, Plasma Spectroscopy, p. 405. McGraw-Hill, New York, 1964.
11. R. M. Gilgenbach and P. L. G. Ventzek, "Dynamics of excimer laser-ablated aluminum neutral atom plume measured by dye laser resonance absorption photograhy,"Appl. Phys. Lett. 58(15), pp. 1597-1599, 1991.
12. N. G. Basov, V. A. Gribkov, O. N. Krokhin, and G. V. Sklizkov, "High temperature effects of intense laser emission focused on a solid target," Sov. Phys. JETP 27(4), pp. 575-582, 1968.
13. G. Callies, P. Berger, and H. Hügel, "Time-resolved observation of gas-dynamic discontinuities arising during excimer laser ablation and their interpretation," J. Phys. D: Appl. Phys. 28, pp. 794-806, 1995.
14. L. I. Sedov, Similarity and Dimensional Methods in Mechanics, Cleaver-Hume Press, London, 1959.
15. A. Ruf, D. Breitling, P. Berger, F. Dausinger, and H. Hügel, "Modeling and investigation of melt ejection dynamics for laser drilling with short pulses," in Third International Symposium on Laser Precision Microfabrication LPM 2002 (Osaka), I. Miyamoto, ed., Proc. SPIE, Intl. Soc. for Optical Engineering, (Bellingham, WA). To be published.
16. F. Dausinger, "Femtosecond technology for precision manufacturing: Fundamental and technical aspects," in Third International Symposium on Laser Precision Microfabrication LPM 2002 (Osaka), I. Miyamoto, ed., Proc. SPIE, Intl. Soc. for Optical Engineering, (Bellingham, WA). To be published.