The effect of pulse repetition rate on laser ablation of polyimide and polymethylmethacrylate-based polymers

Journal of Physics D: Applied Physics

Volumn 29, Issue 5, 1996, Pages 1349-1355

  Burns, F C ^a,b   Cain, Stephen R ^a  

^a IBM MICROELECTRONICS   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; ELECTRON TRANSITIONS; LASER PULSES; LIGHT ABSORPTION; MATHEMATICAL MODELS; PHOTORESISTS; POLYIMIDES; POLYMETHYL METHACRYLATES;

ABSORPTION COEFFICIENT; LASER REPETITION RATE; PULSE REPETITION RATE;

LASER ABLATION;

EID: 0030149411     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/29/5/034     Document Type: Article

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