Near-threshold photoablation characteristics of polyimide and poly(ethylene terephthalate)

Journal of Applied Physics

Volumn 82, Issue 1, 1997, Pages 427-435

  Krajnovich, Douglas J ^a,b  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b WESTERN DIGITAL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000309747     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366290     Document Type: Article

References (46)

1. See, for example: (a) R. Srinivasan and B. Braren, J. Polym. Sci. Chem. Ed. 22, 2601 (1984) (b) R. Srinivasan, B. Braren, and R. W. Dreyfus, J. Appl. Phys. 61, 372 (1987) (c) J. E. Andrew, P. E. Dyer, D. Forster, and P. H. Key, Appl. Phys. Lett. 43, 717 (1983) (d) J. H. Brannon, J. R. Lankard, A. I. Baise, F. Burns, and J. Kaufman, J. Appl. Phys. 58, 2036 (1985) (e) R. S. Taylor, D. L. Singleton, and G. Paraskevopoulos, Appl. Phys. Lett. 50, 1779 (1987).
2. See, for example: (a) R. Srinivasan and B. Braren, J. Polym. Sci. Chem. Ed. 22, 2601 (1984) (b) R. Srinivasan, B. Braren, and R. W. Dreyfus, J. Appl. Phys. 61, 372 (1987) (c) J. E. Andrew, P. E. Dyer, D. Forster, and P. H. Key, Appl. Phys. Lett. 43, 717 (1983) (d) J. H. Brannon, J. R. Lankard, A. I. Baise, F. Burns, and J. Kaufman, J. Appl. Phys. 58, 2036 (1985) (e) R. S. Taylor, D. L. Singleton, and G. Paraskevopoulos, Appl. Phys. Lett. 50, 1779 (1987).
3. See, for example: (a) R. Srinivasan and B. Braren, J. Polym. Sci. Chem. Ed. 22, 2601 (1984) (b) R. Srinivasan, B. Braren, and R. W. Dreyfus, J. Appl. Phys. 61, 372 (1987) (c) J. E. Andrew, P. E. Dyer, D. Forster, and P. H. Key, Appl. Phys. Lett. 43, 717 (1983) (d) J. H. Brannon, J. R. Lankard, A. I. Baise, F. Burns, and J. Kaufman, J. Appl. Phys. 58, 2036 (1985) (e) R. S. Taylor, D. L. Singleton, and G. Paraskevopoulos, Appl. Phys. Lett. 50, 1779 (1987).
4. See, for example: (a) R. Srinivasan and B. Braren, J. Polym. Sci. Chem. Ed. 22, 2601 (1984) (b) R. Srinivasan, B. Braren, and R. W. Dreyfus, J. Appl. Phys. 61, 372 (1987) (c) J. E. Andrew, P. E. Dyer, D. Forster, and P. H. Key, Appl. Phys. Lett. 43, 717 (1983) (d) J. H. Brannon, J. R. Lankard, A. I. Baise, F. Burns, and J. Kaufman, J. Appl. Phys. 58, 2036 (1985) (e) R. S. Taylor, D. L. Singleton, and G. Paraskevopoulos, Appl. Phys. Lett. 50, 1779 (1987).
5. See, for example: (a) R. Srinivasan and B. Braren, J. Polym. Sci. Chem. Ed. 22, 2601 (1984) (b) R. Srinivasan, B. Braren, and R. W. Dreyfus, J. Appl. Phys. 61, 372 (1987) (c) J. E. Andrew, P. E. Dyer, D. Forster, and P. H. Key, Appl. Phys. Lett. 43, 717 (1983) (d) J. H. Brannon, J. R. Lankard, A. I. Baise, F. Burns, and J. Kaufman, J. Appl. Phys. 58, 2036 (1985) (e) R. S. Taylor, D. L. Singleton, and G. Paraskevopoulos, Appl. Phys. Lett. 50, 1779 (1987).
6. (a) S. G. Hansen, J. Appl. Phys. 66, 1411 (1989); ibid. 66, 3329 (1989); (b) P. M. Goodwin and C. E. Otis, Appl. Phys. Lett. 55, 2286 (1989) (c) C. E. Otis, Appl. Phys. B 49, 455 (1989) (d) G. Ulmer, B. Hasselberger, H.-G. Busmann, and E. E. B. Campbell, Appl. Surf. Sci. 46, 272 (1990) (e) R. W. Dreyfus, Appl. Phys. A 55, 335 (1992).
7. (a) S. G. Hansen, J. Appl. Phys. 66, 1411 (1989); ibid. 66, 3329 (1989); (b) P. M. Goodwin and C. E. Otis, Appl. Phys. Lett. 55, 2286 (1989) (c) C. E. Otis, Appl. Phys. B 49, 455 (1989) (d) G. Ulmer, B. Hasselberger, H.-G. Busmann, and E. E. B. Campbell, Appl. Surf. Sci. 46, 272 (1990) (e) R. W. Dreyfus, Appl. Phys. A 55, 335 (1992).
8. (a) S. G. Hansen, J. Appl. Phys. 66, 1411 (1989); ibid. 66, 3329 (1989); (b) P. M. Goodwin and C. E. Otis, Appl. Phys. Lett. 55, 2286 (1989) (c) C. E. Otis, Appl. Phys. B 49, 455 (1989) (d) G. Ulmer, B. Hasselberger, H.-G. Busmann, and E. E. B. Campbell, Appl. Surf. Sci. 46, 272 (1990) (e) R. W. Dreyfus, Appl. Phys. A 55, 335 (1992).
9. (a) S. G. Hansen, J. Appl. Phys. 66, 1411 (1989); ibid. 66, 3329 (1989); (b) P. M. Goodwin and C. E. Otis, Appl. Phys. Lett. 55, 2286 (1989) (c) C. E. Otis, Appl. Phys. B 49, 455 (1989) (d) G. Ulmer, B. Hasselberger, H.-G. Busmann, and E. E. B. Campbell, Appl. Surf. Sci. 46, 272 (1990) (e) R. W. Dreyfus, Appl. Phys. A 55, 335 (1992).
10. (a) S. G. Hansen, J. Appl. Phys. 66, 1411 (1989); ibid. 66, 3329 (1989); (b) P. M. Goodwin and C. E. Otis, Appl. Phys. Lett. 55, 2286 (1989) (c) C. E. Otis, Appl. Phys. B 49, 455 (1989) (d) G. Ulmer, B. Hasselberger, H.-G. Busmann, and E. E. B. Campbell, Appl. Surf. Sci. 46, 272 (1990) (e) R. W. Dreyfus, Appl. Phys. A 55, 335 (1992).
11. (a) S. G. Hansen, J. Appl. Phys. 66, 1411 (1989); ibid. 66, 3329 (1989); (b) P. M. Goodwin and C. E. Otis, Appl. Phys. Lett. 55, 2286 (1989) (c) C. E. Otis, Appl. Phys. B 49, 455 (1989) (d) G. Ulmer, B. Hasselberger, H.-G. Busmann, and E. E. B. Campbell, Appl. Surf. Sci. 46, 272 (1990) (e) R. W. Dreyfus, Appl. Phys. A 55, 335 (1992).
12. See, for example: (a) D. P. Brunco, M. O. Thompson, C. E. Otis, and P. M. Goodwin, J. Appl. Phys. 72, 4344 (1992) (b) A. D. Zweig, V. Venugopalan, and T. F. Deutsch, ibid. 74, 4181 (1993) (c) R. J. von Gutfeld, F. A. McDonald, and R. W. Dreyfus, Appl. Phys. Lett. 49, 1059 (1986).
13. See, for example: (a) D. P. Brunco, M. O. Thompson, C. E. Otis, and P. M. Goodwin, J. Appl. Phys. 72, 4344 (1992) (b) A. D. Zweig, V. Venugopalan, and T. F. Deutsch, ibid. 74, 4181 (1993) (c) R. J. von Gutfeld, F. A. McDonald, and R. W. Dreyfus, Appl. Phys. Lett. 49, 1059 (1986).
14. See, for example: (a) D. P. Brunco, M. O. Thompson, C. E. Otis, and P. M. Goodwin, J. Appl. Phys. 72, 4344 (1992) (b) A. D. Zweig, V. Venugopalan, and T. F. Deutsch, ibid. 74, 4181 (1993) (c) R. J. von Gutfeld, F. A. McDonald, and R. W. Dreyfus, Appl. Phys. Lett. 49, 1059 (1986).
15. See, for example: (a) D. W. Hahn, G. H. Pettit, and M. N. Ediger, J. Appl. Phys. 76, 1830 (1994) (b) J. K. Frisoli, Y. Hefetz, and T. F. Deutsch, Appl. Phys. B 52, 168 (1991) (c) G. Paraskevopoulos, D. L. Singleton, R. S. Irwin, and R. S. Taylor, J. Appl. Phys. 70, 1938 (1991).
16. See, for example: (a) D. W. Hahn, G. H. Pettit, and M. N. Ediger, J. Appl. Phys. 76, 1830 (1994) (b) J. K. Frisoli, Y. Hefetz, and T. F. Deutsch, Appl. Phys. B 52, 168 (1991) (c) G. Paraskevopoulos, D. L. Singleton, R. S. Irwin, and R. S. Taylor, J. Appl. Phys. 70, 1938 (1991).
17. See, for example: (a) D. W. Hahn, G. H. Pettit, and M. N. Ediger, J. Appl. Phys. 76, 1830 (1994) (b) J. K. Frisoli, Y. Hefetz, and T. F. Deutsch, Appl. Phys. B 52, 168 (1991) (c) G. Paraskevopoulos, D. L. Singleton, R. S. Irwin, and R. S. Taylor, J. Appl. Phys. 70, 1938 (1991).
18. See, for example (a) D. L. Singleton, G. Paraskevopoulos, and R. S. Irwin, J. Appl. Phys. 66, 3324 (1989) (b) S. Küper and J. Brannon, Appl. Phys. Lett. 60, 1633 (1992) (c) R. Kelly, A. Miotello, B. Braren, and C. E. Otis, Appl. Phys. Lett. 60, 2980 (1992) (d) D. W. Hahn, M. N. Ediger, and G. H. Petit, J. Appl. Phys. 77, 2759 (1995).
19. See, for example (a) D. L. Singleton, G. Paraskevopoulos, and R. S. Irwin, J. Appl. Phys. 66, 3324 (1989) (b) S. Küper and J. Brannon, Appl. Phys. Lett. 60, 1633 (1992) (c) R. Kelly, A. Miotello, B. Braren, and C. E. Otis, Appl. Phys. Lett. 60, 2980 (1992) (d) D. W. Hahn, M. N. Ediger, and G. H. Petit, J. Appl. Phys. 77, 2759 (1995).
20. See, for example (a) D. L. Singleton, G. Paraskevopoulos, and R. S. Irwin, J. Appl. Phys. 66, 3324 (1989) (b) S. Küper and J. Brannon, Appl. Phys. Lett. 60, 1633 (1992) (c) R. Kelly, A. Miotello, B. Braren, and C. E. Otis, Appl. Phys. Lett. 60, 2980 (1992) (d) D. W. Hahn, M. N. Ediger, and G. H. Petit, J. Appl. Phys. 77, 2759 (1995).
21. See, for example (a) D. L. Singleton, G. Paraskevopoulos, and R. S. Irwin, J. Appl. Phys. 66, 3324 (1989) (b) S. Küper and J. Brannon, Appl. Phys. Lett. 60, 1633 (1992) (c) R. Kelly, A. Miotello, B. Braren, and C. E. Otis, Appl. Phys. Lett. 60, 2980 (1992) (d) D. W. Hahn, M. N. Ediger, and G. H. Petit, J. Appl. Phys. 77, 2759 (1995).
22. See, for example: (a) M. Schumann, R. Sauerbrey, and M. C. Smayling, Appl. Phys. Lett. 58, 428 (1991) (b) S. Lazare and R. Srinivasan, J. Phys. Chem. 90, 2124 (1986).
23. See, for example: (a) M. Schumann, R. Sauerbrey, and M. C. Smayling, Appl. Phys. Lett. 58, 428 (1991) (b) S. Lazare and R. Srinivasan, J. Phys. Chem. 90, 2124 (1986).
24. See, for example: (a) P. E. Dyer, D. D. Jenkins, and J. Sidhu, Appl. Phys. Lett. 49, 453 (1986) (b) R. S. Taylor, K. E. Leopold, D. L. Singleton, G. Paraskvopoulos, and R. S. Irwin, J. Appl. Phys. 64, 2815 (1988) (c) M. Bolle and S. Lazare, ibid. 73, 3516 (1993).
25. See, for example: (a) P. E. Dyer, D. D. Jenkins, and J. Sidhu, Appl. Phys. Lett. 49, 453 (1986) (b) R. S. Taylor, K. E. Leopold, D. L. Singleton, G. Paraskvopoulos, and R. S. Irwin, J. Appl. Phys. 64, 2815 (1988) (c) M. Bolle and S. Lazare, ibid. 73, 3516 (1993).
26. See, for example: (a) P. E. Dyer, D. D. Jenkins, and J. Sidhu, Appl. Phys. Lett. 49, 453 (1986) (b) R. S. Taylor, K. E. Leopold, D. L. Singleton, G. Paraskvopoulos, and R. S. Irwin, J. Appl. Phys. 64, 2815 (1988) (c) M. Bolle and S. Lazare, ibid. 73, 3516 (1993).
27. D. Dijkkamp, A. S. Gozdz, T. Venkatesan, and X. D. Wu, Phys. Rev. Lett. 58, 2142 (1987); see also R. Srinivasan, Phys. Rev. Lett. 60, 381 (1988), Comment and Reply.
28. D. Dijkkamp, A. S. Gozdz, T. Venkatesan, and X. D. Wu, Phys. Rev. Lett. 58, 2142 (1987); see also R. Srinivasan, Phys. Rev. Lett. 60, 381 (1988), Comment and Reply.
29. (a) R. Braun, R. Nowak, P. Hess, H. Oetzmann, and C. Schmidt, Appl. Surf. Sci. 43, 353 (1989)
30. (b) R. Srinivasan, Appl. Phys. A 56, 417 (1993)
31. (c) J. H. Brannon and J. R. Lankard, Appl. Phys. Lett. 48, 1226 (1986).
32. (a) S. Küper, J. Brannon, and K. Brannon, Appl. Phys. A 56, 43 (1993)
33. (b) S. Lazare and V. Granier, J. Appl. Phys. 63, 2110 (1988).
34. D. J. Krajnovich, J. Chem. Phys. 102, 726 (1995).
35. D. J. Krajnovich (unpublished results on pyrocarbon and amorphous carbon).
36. See, for example T. D. Bennett, D. J. Krajnovich, and C. P. Grigoropoulos, J. Appl. Phys. 77, 849 (1995); Phys. Rev. Lett. 76, 1659 (1996). (Additional results on Au, Ag, Cu, Ni, Pb, Si to be published).
37. See, for example T. D. Bennett, D. J. Krajnovich, and C. P. Grigoropoulos, J. Appl. Phys. 77, 849 (1995); Phys. Rev. Lett. 76, 1659 (1996). (Additional results on Au, Ag, Cu, Ni, Pb, Si to be published).
38. D. J. Krajnovich and J. E. Vazquez, J. Appl. Phys. 73, 3001 (1993).
39. E. Stenhagen, S. Abrahamsson, and F. W. McLafferty, Registry of Mass Spectral Data (Wiley, New York, 1974).
40. N. Abuaf, J. B. Anderson, R. P. Andres, J. B. Fenn, and D. G. H. Marsden, Science 155, 997 (1967).
41. X. Zhang, C. P. Grigoropoulos, D. J. Krajnovich, and A. C. Tam, IEEE Trans. Compon., Packaging, Manuf. Technol. C 19, 201 (1996).
42. This viewpoint is exemplified by R. Srinivasan in Ref. 9(b).
43. This viewpoint is exemplified by: S. R. Cain, F. C. Burns, and C. E. Otis, J. Appl. Phys. 71, 4107 (1992).
44. D. L. Singleton, G. Paraskevopoulos, and R. S. Taylor, Chem. Phys. 144, 415 (1990).
45. M. Himmelbauer, E. Arenholz, and D. Bäuerle, Appl. Phys. A 63, 87 (1996).
46. The excimer laser, light tunnel homogenizer, and fluence calibration procedure were the same or closely similar for the present study and that of Küper et al. [Ref. 10(a)], so the fluence scale and surface temperatures should be directly comparable between the two studies.