A microsystem based on porous silicon-glass anodic bonding for gas and liquid optical sensing

Sensors

Volumn 6, Issue 6, 2006, Pages 680-687

  De Stefano, Luca ^a   Malecki, Krzysztof ^a   Della Corte, Francesco G ^b   Moretti, Luigi ^b   Rea, Ilaria ^a   Rotiroti, Lucia ^a   Rendina, Ivo ^a  

^a CNR IMM   (Italy)

^b UNIVERSITY MEDITERRANEA OF REGGIO CALABRIA   (Italy)

Author keywords

Anodic bonding; Lab on chip; Microchamber; Porous silicon

Indexed keywords

CHEMICAL BONDS; CHEMICAL SENSORS; GLASS; MICROCHANNELS; MICROSYSTEMS; POROUS SILICON; SILICON;

ANODIC BONDING; ANODIC BONDING PROCESS; ANODIC BONDING TECHNOLOGY; LAB ON CHIP; MICRO-CHAMBERS; REFLECTIVITY MEASUREMENTS; SILICON GLASS ANODIC BONDING; TIME RESOLVED MEASUREMENT;

GLASS BONDING;

EID: 34248206758     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s6060680     Document Type: Article

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