Anodically bonded silicon-glass optical chip for bio-chemical sensing applications

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5718, Issue , 2005, Pages 38-47

  De Stefano, Luca ^a   Malecki, Krzysztof ^a   Moretti, Luigi ^a   Rendina, Ivo ^a  

^a CNR IMM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; DNA; GENETIC ENGINEERING; GLASS; LASERS; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; OPTICAL FIBERS;

FLAMMABLE SUBSTANCES; MICRO-DOSAGE SYSTEMS; MINIATURIZATION; TRANSDUCER MATERIAL;

POROUS SILICON;

EID: 21844445577     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.591696     Document Type: Conference Paper

References (18)

1. H. F. Arrand, A Loni, R. Arens-Fischer, M. G. Kruger, M. Thoenissen, H. Luth, S. Kershaw, and T. M. Benson, "Novel liquid sensor based on porous silicon optical waveguides", P. Tech. Lett. 10, 1467 (1998).
2. S. Zangooie. R. Bjorklund and H. Arwin, Ellipsometric characterization of anisotropic porous silicon Fabry-Pérot filters and investigation of temperature effects on capillary condensation efficiency", J. Appl. Phys. 86, 850 (1999).
3. J. Gao, T. Gao and M.J. Sailor, "Porous-silicon vapor sensor based on laser interferometry", Appl. Phys. Lett. 77, 901 (2000).
4. V. Mulloni and L. Pavesi, "Porous silicon microcavities as optical chemical sensors", Appl. Phys. Lett. 76, 2523 (2000).
5. P. A. Snow, E. K. Squire, P. St. J. Russel, and L. T. Canaham. "Vapor sensing using the optical properties of porous silicon Bragg mirrors", J. Appl. Phys. 86, 1781 (1999).
6. M. A. Muriel and A. Carballar, "Internal field distributions in fiber Bragg gratings", IEEE P. Technol. Lett. 9, 955-957 (1997).
7. J. E. Spanier and I. P. Herman, "Use of hybrid phenomenological and statistical effective-medium theories of dielectric functions to model the infrared reflectance of porous SiC films", Phys. Rev. 61, 10437 (2000).
8. P. Allcock and P.A. Snow, "Time-resolved sensing of organic vapors in low modulating porous silicon dielectric mirrors", J. Appl. Phys. 90, 5052-5057 (2001).
9. V. S.-Y. Lin, K. Motesharei, K.-P. S. Dancil, M. J. Sailor, M. R. Ghadiri, "A porous silicon-based optical interferometric biosensor", Science 278, 840 (1997).
10. S. Chan, P. M. Fauchet, Y. Li, L. J. Rothberg, B. L. Miller, "Porous silicon microcavities for biosensing applications", Phys. Stat. Sol. (a) 182, 541 (2000).
11. L. De Stefano, I. Rendina, L. Moretti, A.M. Rossi, A. Lamberti, P. Arcari, "Porous silicon microcavities in biochemical sensing", Sensor for Environmental Control, Edited by P. Siciliano, Word Scientific, 46-50 (2003).
12. K.-P. S. Dancil, D. P. Greiner, and M. J. Sailor, "A porous silicon optical biosensor: detection of reversible binding of IgG to a protein A-modified surface", J. Am. Chem. Soc.,121, 7925-7930 (1999).
13. M. P. Stewart, and J. M. Buriak, "Exciton-mediated hydrosilylation on photoluminescent nanocrystalline silicon", J. Am Chem. Soc. 123, 7821 (2001).
14. L. De Stefano, L. Moretti, A. Lamberti, O. Longo, M. Rocchia, A. M. Rossi, P. Arcari, I. Rendina, "Optical sensors for vapors, liquids, and biological molecules based on porous silicon technology", IEEE Trans. on Nanotech., 3(1), 49-54 (2004)
15. M.C. Desai and L.M.S. Stramiello "Polymer bound EDC (P-EDC): a convenient reagent for formation of an amide bond", Tetrahedron Letters 43, 7685 (1993).
16. W. Rychlik, W.J. Spencer, and R.E. Rhoads, "Optimization of the annealing temperature for DNA amplification in vitro", Nucl. Acids. Res. 18, 6409, (1990).
17. E. Obermeier, Proc. Semiconductor Wafer Bonding, Science, Technology and Applications. Electrochem. Soc. (1995), pp 212-20.
18. K. Hermasson, U. Lindberg, G. Palmskog, Electrochem. Soc. Fall Mtg, Proceed., (1991), pp 91-92.